T. Kato

ORCID: 0000-0003-1821-3197
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About
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Research Areas
  • Spine and Intervertebral Disc Pathology
  • Integrated Circuits and Semiconductor Failure Analysis
  • Electron and X-Ray Spectroscopy Techniques
  • Advancements in Photolithography Techniques
  • Spinal Fractures and Fixation Techniques
  • Medical Imaging and Analysis
  • Semiconductor materials and devices
  • Scoliosis diagnosis and treatment
  • Metallurgy and Material Forming
  • Metal Forming Simulation Techniques
  • Ion-surface interactions and analysis
  • Advanced Electron Microscopy Techniques and Applications
  • Advanced Surface Polishing Techniques
  • Plasma Diagnostics and Applications
  • Welding Techniques and Residual Stresses
  • Microstructure and mechanical properties
  • Semiconductor materials and interfaces
  • Magnetic confinement fusion research
  • Superconductivity in MgB2 and Alloys
  • Hip disorders and treatments
  • Laser and Thermal Forming Techniques
  • Copper Interconnects and Reliability
  • Laser-induced spectroscopy and plasma
  • Industrial Vision Systems and Defect Detection
  • 3D IC and TSV technologies

Gifu University
2024

Mie University
2011-2024

Seirei Hamamatsu General Hospital
2024

Saga University
2024

Khon Kaen University
2024

Mitsubishi Electric (Japan)
1981-2023

Chubu University
2022

Santen (Japan)
2015

Mie University Hospital
2010

University of Fukui
1999-2001

A new technique to determine the depth distribution of energy loss, so-called depth-dose function, is described for electrons whose energies ranged from 15 30 keV at normal and 45° incident angles. This method based on a series measurements currents induced by penetration energetic through metal-oxide-semiconductor-structure (Al–SiO2–Si) specimen metal electrode formed an aluminum layer deposited in stepwise manner. The experimental function range-energy relation are compared with other...

10.1063/1.1663311 article EN Journal of Applied Physics 1974-02-01

There have been several reports on the pullout strength of cortical bone trajectory (CBT) screws, but only one study has reviewed stability functional spine units using CBT method. The purpose this was to compare vertebral after fixation with that pedicle screw (PS) fixation.

10.1186/s13018-015-0270-0 article EN cc-by Journal of Orthopaedic Surgery and Research 2015-08-15

Background: Studies have shown that walking in forests can a relaxation effect, but the participants only walked for about 15 minutes. Methods and findings: The study adopted an open crossover design, which 22 healthy male volunteers were randomly assigned to two groups. first group Kodo forest course urban second, while second completed walks reverse order. was 4 km from foot pass back, took around 2 hours. at exercise intensity equal of course. We used both physiological psychological...

10.21767/2171-6625.1000174 article EN cc-by Journal of Neurology and Neuroscience 2017-01-01

A variational method is proposed for calc ulating t he fr equencies of hin elastic plate with free edges, rigorous error e imates.As a numerical example, funda m en tal frequency square Poisson ratio 0.225 calculated satisfactor y r esul , the possible relative being less han 1/2000.Gene rali zation to more co mplicated boundary condi ions straightforward.

10.6028/jres.059.017 article EN Journal of research of the National Bureau of Standards 1957-09-01

Cross sections of the patterns fabricated in (100) GaAs by 100-keV gallium focused ion beam have been studied using a scanning electron microscope (SEM). The probe size is 0.1–0.15 μm at current 100 pA. etched depth becomes saturated high dose region (about 5.0×10−6 C/cm) because redeposition effect. pattern profile asymmetric if it made up several adjacent lines perpendicular to direction due effect and increase sputtering yield for each scan, which caused change incident angle. These...

10.1063/1.335387 article EN Journal of Applied Physics 1985-01-01

A focused ion beam (FIB) technology has many advantages for submicron structure fabrication and other maskless processes. In order to develop 4–16 M(D) RAM, the FIB is strongly desired its capability of lithography without proximity effects.

10.1116/1.583289 article EN Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 1985-01-01

The stacking-fault tetrahedron in an epitaxial Si layer was observed the electron-beam-induced current mode using scanning electron microscope. contrast mechanism involved stair-rod partial dislocations of analyzed on basis a simplified model. calculation seems to fit experiment since good agreement obtained between and calculated results.

10.1063/1.1663852 article EN Journal of Applied Physics 1974-09-01

Experimental and theoretical study was carried out on cross sectional profiles of resist patterns for line area exposures. work performed using an electron beam exposure system, where a PMMA film 6000 Å thickness used as the incident energy 20 keV. The electron-beam probe size measured from spectrum secondary signal when scanned over fine gold wire. diameter 5500 Å. developer 1:1 solution MIBK IPA. time evolution profile obtained SEM observation at various development times. Theoretical...

10.1116/1.570283 article EN Journal of Vacuum Science and Technology 1979-11-01

Several studies showed instantaneous axis of rotation (IAR) in the intact spine. However, there has been no report on trajectory IAR a damaged spine or that fixed with instrumentation. It is aim this study to investigate lumbar using vertebra deer.Functional spinal units (L5-6) from five deer were evaluated six-axis material testing machine. As specimen models, we prepared normal model, and pedicle screw (PS) model. We measured during bending coronal sagittal planes axial rotation. In test,...

10.1186/s13018-017-0677-x article EN cc-by Journal of Orthopaedic Surgery and Research 2017-11-16

Electron-beam fabrication offers several important advantages for lithography, including a capability of geometries smaller than one micrometer, high adaptability to automation and the ability write directly on Si wafer without need mask. However, submicron patterns, proximity effect is observed by behavior incident electrons in resist. In electron-beam lithography exposure intensity distribution (hereafter EID) an essential physical quantity implementing correction. There are many...

10.1116/1.571260 article EN Journal of Vacuum Science and Technology 1981-11-01

BACKGROUND Surgery with pedicle screw instrumentation does not provide sufficient torsional stability. This leads to pseudoarthrosis, loosening of the screws, and, ultimately, implant failure. MATERIAL AND METHODS Functional spinal units from 18 deer were evaluated using a 6-axis material testing machine. As specimen models, we prepared an intact model, damaged cross-rod and cross-link model. We measured range motion (ROM) during bending rotation tests. RESULTS The motions model almost equal...

10.12659/msmbr.906339 article EN Medical science monitor basic research/Medical science monitor. Basic research 2018-01-26

A molybdenum silicide (Mo-silicide) film deposited on a quartz glass substrate offers major advantages as high performance photomask material for very large scale integrated (VLSI) fabrication. There is no pattern missing due to exfoliation after ultrasonic cleaning with frequency of 28 kHz and 300 W power, being scrubbed over 10 cycles pressure water jet. Reflectivity optical density the Mo-silicide are not affected by acidic chemicals. Moreover, dry etching can be done at rate 50 nm/min;...

10.1116/1.583523 article EN Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 1986-07-01

Charging effect induced by an analyzing electron beam of a SEM has been observed on the cleaved surface silicon wafer. It was ensured that this is due to formation oxide layer surface. Using effect, two new applications electron-beam-induced-current (EBIC) mode are performed. One them distinction between n− and n+ regions in EBIC image with high contrast. The other observation defects located at as image.

10.1063/1.321823 article EN Journal of Applied Physics 1975-05-01

The internal fixing materials made from shape-memory alloys (SMAs) have recently been reported for long bone fracture. We present a new fixation technique using cylindrical SMAs implant in rat femoral fracture healing. was designed shape to circumferentially fix the fractured resilient SMA claws. To evaluate ability of implant, three-point bending and rotation tests were performed. Fifteen female Wister rats treated surgically as an experimental model. All killed at 16 weeks postoperatively,...

10.2174/1874325001206010239 article EN cc-by The Open Orthopaedics Journal 2012-06-29

A 200-MHz double-data-rate synchronous-DRAM (DDR-SDRAM) was developed. The chip contains a delay-locked loop (DLL) which performs over wide range of operating conditions. Post-mold-tuning allows precise replica programming. intra-chip data bus is suitable for DDR operation.

10.1109/4.881215 article EN IEEE Journal of Solid-State Circuits 2000-11-01

Comparing the images of stacking faults obtained by a scanning electron microscope (SEM) with those optical method, we found that not all existing are observed in an EBIC image SEM and which give no contrast show preferential etching Sirtl etchant.

10.1063/1.88220 article EN Applied Physics Letters 1975-04-15

The mixed exposure of 200 keV Be++ and 100 Be+ focused ion beams was applied to the fabrication a mushroom gate GaAs metal-semiconductor field-effect transistor (MESFET). This method has advantages high resolution simplified resist structure. radiation damage reduced by use RIE-assisted developing. fabricated FET shows low resistance, which is about 1/4 conventional FET.

10.1116/1.583867 article EN Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 1987-01-01

Background Many studies have been conducted on the biomechanics of spine to elucidate fixation properties spinal fusion surgery and causes instrumentation failure. Among these studies, there are some load sharing in measurement using strain gauges pressure gauges, but is a lack research axial compressive loads. Methods Axial tests were performed human cadaveric injured lumbar vertebrae fixed with pedicle screws (PS). Both generated PS rod intradiscal measured. Subsequently, stress...

10.7759/cureus.53961 article EN Cureus 2024-02-10

Although kissing spine syndrome in the lumbar spinal region is a relatively common condition older adults, no study examining its biomechanical characteristics has been reported. We hypothesized that of spinous processes during extension causes an increase flexural rigidity and significantly limits deformation behavior extension, which turn might cause lower back pain.

10.2147/orr.s468237 article EN cc-by-nc Orthopedic Research and Reviews 2024-07-01

10.1299/jsmermd.2024.2p2-s03 article EN The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) 2024-01-01

A two-layer resist structure using EBR-9 and PMMA for fabricating a fine metal line with mushroom-like cross-sectional profile is reported. The provides T-shaped cavities undercut profiles electron-beam exposure. With the optimum developing condition, bottom opening as small 0.1 µm, top wide enough not to require an additional exposure in order obtain lift-off pattern. Monte Carlo calculation carried out analyze of structure, it shown that 0.1-µm can be obtained high-sensitivity on...

10.1109/t-ed.1987.22992 article EN IEEE Transactions on Electron Devices 1987-04-01
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