A5090939380- Photonic and Optical Devices
- Advanced Fiber Laser Technologies
- Semiconductor Lasers and Optical Devices
- Advanced Photonic Communication Systems
- Advanced Fiber Optic Sensors
- Photonic Crystals and Applications
- Advanced Surface Polishing Techniques
- Optical Coatings and Gratings
- Laser-Plasma Interactions and Diagnostics
- High-pressure geophysics and materials
- Laser-Matter Interactions and Applications
- Laser-induced spectroscopy and plasma
- Spectroscopy and Laser Applications
- Optical Network Technologies
- Surface Roughness and Optical Measurements
- Advanced Optical Sensing Technologies
- Quality and Safety in Healthcare
- Laser Material Processing Techniques
- Geophysics and Sensor Technology
- Advanced Optical Imaging Technologies
- Biomedical and Engineering Education
- Antenna Design and Optimization
- Microplastics and Plastic Pollution
- Advancements in Photolithography Techniques
- Laser Design and Applications
CEA LETI
2003-2024
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
2015-2024
National Energy Technology Laboratory
2024
CEA Grenoble
2014-2023
Université Grenoble Alpes
2014-2023
Institut polytechnique de Grenoble
2019-2023
Institut Nanosciences et Cryogénie
2014-2017
In this work, we present two-dimensional beam steering in the near-infrared using a SiN integrated circuit, containing optical phased arrays. Beam was achieved over range of 17.6° × 3°, at fixed wavelength 905 nm. The first dimension steered via phase differences between array channels. second accessed by actively switching various sub-devices output diffraction gratings with different periods. characterisation performed on wafer-level test station.
Silicon photonics is one of the most prominent technology platforms for integrated and can support a wide variety applications. As we move towards mature industrial core technology, present integration silicon nitride (SiN) material to extend capabilities our platform. Depending on application being targeted, have developed several strategies incorporation SiN. We these processes, as well key components dedicated In particular, use SiN athermal multiplexing in optical transceivers datacom...
Generating pure proton beams using lasers for novel cancer therapies has long challenged researchers. In a new experiment, scientists irradiate thin hydrogen ribbon with high-power laser to generate large and population of protons.
Abstract The development of very high power laser opens up new horizons in a various field, such as protontherapy medicine or laser-matter interaction physics. Target Normal Sheath Acceleration phenomenon is used the first one. After impact, plasma generated, and free electrons move forward. It creates an electrostatic which can accelerate protons at rear side target. generated beam be able to contain energetic with large spectrum(1–200 MeV). This energy distribution depends on nature...
Generation of optical frequency combs (OFC) using semiconductor laser sources has been an active research topic for years, since they offer good performances many applications without the bulky and expensive aspects ion doped fiber or crystal based sources. In this paper, we demonstrate generation low free spectral range mode-locked hybrid III-V/Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N...
We discussed the X-rays permanent radiation effects on a variety of passive components developed using silicon photonics platform CEA-Leti. The objective is to assess vulnerability such devices at different total ionizing dose (TID) levels provide an overview main in this class components. In detail, we have irradiated room temperature grating couplers, microring resonators (MRRs), Mach–Zehnder interferometers (MZIs), Echelle de-multiplexers five doses, from 152 Gy(Si) 1.52 MGy(Si) with...
We introduce our 200 mm Si-SiN photonics platform for high-speed and energy-efficient optical transceiver. present the fabrication process as well wafer level characterizations in O-band of Si SiN photonic components such waveguides, grating fiber couplers interlayer adiabatic transitions. demonstrate a low thermo-optic coefficient layer large bandwidth hybrid devices. This enhanced is great importance realization CWDM transceivers which temperature sensitivity are needed.
This numerical study focused on the errors that can occur when ellipsometric spectroscopic scatterometry programs are used for critical dimension (CD) control and other significant geometrical parameters. The role of number wavelengths, measurements noise spectral range is analyzed in terms CD precision. Conversely, an important part devoted to effect a bad shaping modelling lines (corner rounding, foot notch effects) characterization index. We show technique very resistant measurement...
LIDAR in automotive systems typically uses 905nm or 940nm wavelength light for short to medium range mapping. The fabrication of an Optical Phase Array (OPA) applications at on a silicon nitride platform using metal heaters beam steering is reported here.
With the recent progress in integrated silicon photonics technology and development of efficient quantum cascade laser (QCL), there is now a very good opportunity to investigate new gas sensors offering both high sensitivity, selectivity (multi-gas sensing, atmosphere analysis) low cost thanks integration on planar substrate. In this context, we have developed singlemode optical waveguides mid-infrared based Silicon/Germanium alloy silicon. These waveguides, compatible with standard...
Optical frequency combs are at the center of numerous applications such as LIDAR and RADAR systems, metrology, telecommunication, spectroscopy. Among different ways comb generation, integrated mode-locked lasers offer lower cost, smaller footprint, easier system integration than their bulk counterparts. In this work, we demonstrate a III-V/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{S}_{\mathrm...
We demonstrate ultra-low optical losses in silicon waveguide by applying a smoothing annealing with no morphological deformation. reach record-low at 1310nm 0.1 dB/cm single mode waveguide, while the performances of other devices platform are preserved.
Sub-50 nm half pitch critical dimension metrology of resist lines by a fast goniometric scatterometry technique in the visible range has been investigated. The optical instrumentation allows illumination and reflection patterned objects from almost all angles view (0°/80° polar angles, 0°/360° azimuthal angles) simultaneously. Applied to scatterometry, this tomography-like ensures robust profiles reconstruction. Sensitivity correlation analysis show that exhibits at least equal performances...
We introduce our 200 mm Si-SiN photonic platform targeting energy-efficient optical transceivers. present the fabrication process and wafer level characterizations in O-band of a temperature quasi-insensitive SiN multiplexer as well hybrid grating fiber coupler interlayer transition.
For the majority of packaging schemes in silicon photonics, out-of-plane optical access to waveguide layer is achieved via chip frontside, away from substrate. As such, fiber grating couplers have generally been optimized with this mind. In article, we present two strategies for designing a coupler coupling fibers placed on backside chip, without need superposed reflective layers. An all O-band designed, fabricated, and measured peak efficiency single mode -2.8 dB -1 bandwidth ~40 nm. second...
This paper describes the design, fabrication, and experimental characterization of several photonic integrated components specifically made for a novel retinal projection concept augmented reality applications. The is based on combination optics holography to generate self-focusing image retina. circuit used projector passive fabricated with stoichiometric Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N...
Compact frequency comb sources are intensively studied for integration in many applications such as LiDAR, RADAR, spectroscopy or metrology. In this work, we report the optical and electrical spectra, phase noise pulse duration of a InP-Si3N4 hybrid mode-locked laser used harmonic active mode-locking.
A silicon photonics optical phased array with a two-dimensional matrix of antennas is experimentally demonstrated in which the unitary are optimized such that light can be emitted over high fraction overall surface. This design strategy used to obtain low divergence beam containing significant total power, at expense reduced steering range. type device suited phase front correction wireless communications systems.
This paper presents infrared photonic multiplexers integrated on silicon designed to be assembled with QCL or ICL arrays in order realize different possible broadband powerful tunable sources the mid-infrared for multi-gas sensing.
In this paper, we present a 1.19 GHz integrated mode locked laser based on III-V/Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> butt-coupling. We report the results of active locking and harmonic up to 2 <sup xmlns:xlink="http://www.w3.org/1999/xlink">nd</sup> harmonic. also preliminary another lasers at repetition rate 360 MHz. To best our knowledge, is lowest for an hybrid .
The development of very high power lasers opens up new horizons in various fields, such as laser plasma acceleration Physics and innovative approaches for proton therapy Medicine. Laser driven is commonly based on the so-called Target Normal Sheath Acceleration (TNSA) mechanisms: a focused onto solid target (thin metallic or plastic foil) interact with matter at intensity, thus generating plasma; consequence "hot" electrons are produced move into forward direction through target. Protons...
Roughness has always been a key detractor of the optical losses within silicon photonics devices. With scaling at 300mm wafer, there is an introduction new tools such immersion lithography scanner, OPC technique that can help to drive furthermore reduction. This study will detail work done on characterizing multiple steps process (Lithography, Etch, Annealing) and using roughness LER (Line Edge Roughness), LWR Width Roughness) finally PSD (Power Spectral Density) understand main each step....
For several years, there has been a diversification of applications addressed by silicon photonics. Historically intended for telecom applications, photonic platforms must now address the needs transceivers Data Center Interconnect, 5G backhaul / fronthaul but also those emerging such as circuitry LiDAR or high performance computing (Artificial Intelligence, Quantum Computing). In order to meet this growing demand and diversity accompanying all these CEA LETI developed new photonics platform...