A5053660197- Advanced MEMS and NEMS Technologies
- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Advanced Fiber Optic Sensors
- Structural Health Monitoring Techniques
- Sensor Technology and Measurement Systems
Xi'an Jiaotong University
2018-2025
Herein, a novel in-plane dual-axis micro-electro-mechanical system piezoresistive accelerometer was proposed based on theoretical and simulation analyses. Its self-support beam (SPB) possessed the features of force amplification axial deformation to obtain high sensitivity. To clarify influence structural dimensions performance pure axial-deformation condition SPB, model established analyze mechanical behavior. The results were in well accordance with ones, displaying maximum relative error...
A novel structure was presented for a microelectromechanical system (MEMS) piezoresistive (PZR) accelerometer. Taking the advantage of effects tiny beam (TPB) to generate stress concentration region (SCR) and microleverage mechanism amplify force, PZR accelerometer proposed with improved sensitivity. The measured sensitivity determined by amplified inertia force applied TPBs. Based on model analyses, amplification factor influenced beams' spring constants distance between support TPB....
A novel ultra-high g shock micro accelerometer with four self-supporting piezoresistive beams was proposed to simultaneously enhance the sensor performance of sensitivity and frequency response. The finite element method (FEM) simulations indicated that pure axial deformations could occur on via optimizing structure dimensions. And average stress distribution in 81.5 MPa, natural about 505.00 kHz. To verify fabricated accelerometer, impact tests were carried out using Hopkinson pressure bar...
It has been demonstrated that piezoresistive beams in a purely axial deformation state significantly enhance the performance of accelerometer. Current solution to realize for high-performance microaccelerometer relies heavily on beam positions, which limits its design flexibility and error tolerance fabrication process. In this article, novel structure with position independent pure axially deformed is proposed. By controlling synchronous displacements at both ends beams, stress states can...