A5037635139- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Diamond and Carbon-based Materials Research
- Advanced Surface Polishing Techniques
- Advanced Fiber Optic Sensors
- Acoustic Wave Resonator Technologies
- Metal and Thin Film Mechanics
- Advanced Sensor and Energy Harvesting Materials
- Organometallic Compounds Synthesis and Characterization
- 3D IC and TSV technologies
- Advanced machining processes and optimization
- Electronic Packaging and Soldering Technologies
- Integrated Circuits and Semiconductor Failure Analysis
- Chemical Synthesis and Analysis
- Crystal structures of chemical compounds
Xi'an Jiaotong University
2019-2023
Shanghai Jiao Tong University
2004
National Institute for Environmental Studies
2004
Based on micro-indentation mechanics and kinematics of grinding processes, theoretical formulas are deduced to calculate surface roughness (SR) subsurface damage (SSD) depth. The SRs SSD depths a series fused silica samples, which prepared under different parameters, measured. By experimental analysis, the relationship between SR depth is discussed. effect parameters investigated quantitatively. results show that decrease with increase wheel speed or feed as well cutting interaction should...
Abstract In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured applied to the diaphragm will cause frequency shift of resonator. working mode stress–frequency theory double-ended tuning fork with an enhanced coupling beam proposed, which compatible simulation experiment. A unique detection method small axially deformed beams status other adjacent outputs are easily shielded. According structure design,...
Abstract A high-accuracy differential resonant pressure sensor with two similar resonators is proposed using the linear fitting method to guarantee its output linearity without polynomial compensation. Results reveal that nonlinearity of largely dependent on tensile/compressive pressure–stress ratio c when are used separately as compressive and tensile elements. Nonlinearity decreases sharply an appropriate . theoretical model obtain minimal shows satisfactory agreement simulation results....
A novel structure was presented for a microelectromechanical system (MEMS) piezoresistive (PZR) accelerometer. Taking the advantage of effects tiny beam (TPB) to generate stress concentration region (SCR) and microleverage mechanism amplify force, PZR accelerometer proposed with improved sensitivity. The measured sensitivity determined by amplified inertia force applied TPBs. Based on model analyses, amplification factor influenced beams' spring constants distance between support TPB....
MEMS capacitive sensors promise wide applications in the field of high precision pressure sensing because their low temperature drift, power consumption and precision. Based on deformation principle diaphragm under pressure, we present design fabrication process a novel sensor, which consists island-diaphragm composited structure comb electrode. Furthermore, finite element simulation analysis is conducted to demonstrate excellent performance sensor. The results show that capacitance output...
C 3 6H24N 8 Oi2Pb2, triclinic, PI (no.2), a = 8.624(3) A, b 10.424(3)A, c 11.295(4)A, 97.154(5)°,P 106.891(4)°,y 109.874(4)°,V= 885.2A , Z= 1, R^F) 0.023, wR^F 2 )= 0.057, T= 298 K. Source of materialA solution (10 ml) dimethylformamide containing Pb(NC>3)2 • 4H2O (0.5 mmol) and para-nitrophenol was added slowly to 1,10-phenanthroline (1.0 mmol).The mixture stirred for 40 minutes left stand at room temperature about three weeks.Yellow block crystals were obtained.