A5005774975- Metal and Thin Film Mechanics
- Vacuum and Plasma Arcs
- Diamond and Carbon-based Materials Research
- Advanced Sensor Technologies Research
- Advanced materials and composites
- Semiconductor materials and devices
- Plasma Applications and Diagnostics
- Ion-surface interactions and analysis
- Plasma Diagnostics and Applications
- Electrohydrodynamics and Fluid Dynamics
- Polymer Nanocomposite Synthesis and Irradiation
- Advanced Surface Polishing Techniques
- Electrostatic Discharge in Electronics
- Titanium Alloys Microstructure and Properties
- Integrated Circuits and Semiconductor Failure Analysis
- Bone Tissue Engineering Materials
- Boron and Carbon Nanomaterials Research
- Surface Modification and Superhydrophobicity
- High-Temperature Coating Behaviors
- Mass Spectrometry Techniques and Applications
- Intermetallics and Advanced Alloy Properties
- Scientific Measurement and Uncertainty Evaluation
- Laser-induced spectroscopy and plasma
- Transition Metal Oxide Nanomaterials
- Hydrogen Storage and Materials
Institute of High Current Electronics
2015-2024
Siberian Branch of the Russian Academy of Sciences
2019-2021
Plasma (Russia)
2021
Russian Academy of Sciences
2008-2012
Ministry of Defence
2012
Vacuum arc ion sources have been made and used by a large number of research groups around the world over past twenty years. The first generation vacuum (dubbed “Mevva,” for metal vapor arc) was developed at Lawrence Berkeley National Laboratory in 1980s. This paper considers design, performance parameters, some applications new modified version this kind source which we called Mevva-V.Ru. produces broad beams ions an extraction voltage up to 60 kV time-averaged beam current milliampere...
The ion current from different cathode materials was measured for 50-500 A of arc current. normalized by the found to depend on material, with values in range 5% 19%. generally greater elements low cohesive energy. erosion rates were determined and charge states, which previously same source. absolute ranged 16-173 /spl mu/g/C.
This paper presents the results of time-of-flight mass spectrometry studies elemental and mass-to-charge state compositions metal ion beams produced by a vacuum arc source with compound cathode (WC–Co0.5, Cu–Cr0.25, Ti–Cu0.1). We found that beam composition agrees well stoichiometric material from which is derived, maximum charge different plasma components determined ionization capability electrons within spot plasma, common to all components. The spectrum features greater fraction multiply...
The angular distribution of the different cathode materials and gaseous ion flow from vacuum arc plasma is investigated. A metal-vapor-vacuum-arc-type source a time-of-flight mass spectrometer were used. experiments performed using range materials, including C, Al, Zn, Cu, Ti, Co, Cr, W, Pb, <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hbox{Cu}_{0.7}\hbox{Cr}_{0.3}$</tex></formula> ,...
We present research results on vacuum arc plasma produced with multicomponent cathode made of several different elements. The ion mass-to-charge-state spectra the plasmas were studied by time-of-flight spectrometry. angular distributions species measured, and kinetic energy their directed (streaming) motion was determined. It is shown that fractional composition ions components in flow from spot closely matches content these composite cathode. charge states various are determined average...
This paper presents measurements of the angular distribution plasma components and different charge states metal ions generated by a MEVVA-type ion source measured time-of-flight mass-spectrometer. The experiments were performed for cathode materials (Al, Cu, Ti) parameters vacuum arc discharge. results are compared with prior reported other authors. influence discharge on in is discussed.
The Metal Vapor Vacuum Arc (MEVVA) ion sources are capable of generating beams almost all metals the periodic table. For this kind source, a combination gas feeding with magnetic field allows simultaneous generation both metal and gaseous ions. That makes MEVVA source an excellent instrument for science application. This work presents results investigation angular distributions in vacuum arc plasma Mevva-V.Ru composite cathodes elevated pressure. It was shown that cathode materials, singly...
The total ion current generated by a vacuum arc plasma source was measured. discharge system investigated allowed collection from the streaming through hemispherical mesh anode with geometric transparency of 72%. A range different cathode materials investigated, and varied over 50–500A. We find that normalized (Iion∕Iarc) depends on material, values in 5% to 19% generally greater for elements low cohesive energy. application strong axial magnetic field region leads increased current, but...
An ion source based on a planar magnetron sputtering device with thermally isolated target has been designed and demonstrated. For boron target, high temperature is required because low electrical conductivity at room temperature, increasing temperature. The well-insulated can be heated by an initial low-current, high-voltage discharge mode. A power of 16 W was adequate to attain the surface (400 degrees C), followed transition high-current, low-voltage mode for which enters self-sputtering...
An experimental and theoretical study of the content deuterium ions in arc discharge plasma was performed for deuterated zirconium cathodes. It found experimentally that ion percentage increased significantly with increasing current decreasing duration, reaching 85% at kiloampere currents few microsecond durations. In this case, a clear correlation between mean charge ions: higher Zr charge, greater amount plasma. A model developed to describe ionization processes occur vacuum cathode. shown...
A boron ion source based on planar magnetron discharge with solid target has been developed. To obtain a sufficient conductivity of the for high current ignition, was heated to temperature more than 350 °C. reach this temperature, thermally isolated by low-current high-voltage DC discharge. Applying high-current pulse (100 μs range) provides self-sputtering mode discharge, which generates plasma. Boron beam 150 mA extracted from plasma applying an accelerating voltage 20 kV. The fraction in...
We report on the production of metal ions magnesium and zinc in beam plasma formed by a forevacuum-pressure electron source. Magnesium vapor were generated evaporation from crucible subsequently ionized impact e-beam itself. Both gaseous metallic plasmas separately produced characterized using modified RGA-100 quadrupole mass-spectrometer. The fractional composition isotopes corresponds to their natural abundance.
This paper deals with the computer modeling of vacuum arc composite multicomponent cathode. is typical for certain kind ion sources, plasma generator and interrupters. The described hybrid model treats electrons as an inertialess fluid ions macroparticles. macroparticle dynamic calculated use particle-incell method. Ion-ion Coulomb collision considered Monte Carlo can simulate a whole including separate cathode jets, mixing zone, common column. dependence angular current distribution on...
The paper reports on a study of the mass-charge state plasma produced in vacuum arc discharge with composite cathodes which were copper-disk coated hydrogenated Zr film thicknesses 9, 22, and 35 μm. allow generation multicomponent gas metal ion beams hydrogen content from several to tens percent. Also investigated is dependence H fraction beam thickness during erosion point disappearance peaks spectra. ability system produce ions analyzed by analyzing cathode lifetime as function pulse...
An integrated study of poly-L-lactide (PL) synthesis and the physicochemical properties film surfaces, both modified by silver carbon ion implantation also unmodified PL has been carried out. Surface modification was done using aMevva-5.Ru metal source with doses 1·1014, 1·1015 1·1016 ion/cm2. Material characterization NMR, IRS, XPS AFM. The molecular weight (MW), micro-hardness, surface resistivity, limiting wetting angle un-implanted implanted samples were measured. results reveal that...