Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application metasurfaces on-chip surface (SAW) at sub-GHz frequencies requires further exploration since their functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control quantum processing. Here, the experimental realization SAW is reported, gradient...

We demonstrate the feasibility of machine-learning aided UV absorbance spectroscopy for in-process microbial contamination detection during cell therapy product (CTP) manufacturing. This method leverages a one-class support vector machine to analyse spectra cultures and predict if sample is sterile or contaminated. label-free technique provides rapid output (< 30 minutes) with minimal preparation volume 1 mL). Spiking 7 organisms into mesenchymal stromal cells supernatant aliquots from 6...

This paper presents a simple method based on the measurement of 3D intensity point spread function for quality evaluation high numerical aperture micro-optical components. The different slices focal volume are imaged thanks to microscope objective and standard camera. Depending optical architecture, it allows characterizing both transmissive reflective components, which either imaging part or component itself moved along axis, respectively. can be used measure length, Strehl ratio,...

This paper presents the study of a fabrication technique lenses arrays based on reflow glass inside cylindrical silicon cavities. Lenses whose sizes are out microfabrication standards considered. In particular, case high fill factor is discussed in detail since proximity between generates undesired effects. These effects, not experienced when sufficiently separated so that they can be considered as single items, corrected by properly designing Complete topographic well optical...

This paper investigates the parameter optimization of isotropic bulk silicon microscale etching using an inductively coupled plasma-deep reactive ion (ICP-DRIE) system. Etch profile characteristics, depending on process and feature size, have been studied. The authors report detailed observations results for various parameters, including pressure from 30 to 70 mTorr, sulfur hexafluoride flow rate 100 500 sccm, platen power 20 150 W, ICP 2000 2500 W. goal here is present anisotropic etch...

This letter reports on the development of an integrated micro-optical beam splitter that can be array-arranged. The proposed wafer-level fabrication, based 45 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> saw-dicing glass substrates, allows rapid and low-cost processing. In particular, it leads to high compactness possibility alignment/assembly, suitable for vertically imaging micro-instruments. device, including additional out-of...

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for fabrication of gratings, including microelectromechanical system (MEMS) which is by now mature presents opportunities tunable through inclusion an actuation mechanism. We designed, modeled, fabricated tested a silicon based pitch diffraction grating (PTG) with relatively large resolving power that could be deployed...

This paper presents a concept of an endomicroscope for early detection neoplastic lesions in the human stomach tissue, based on swept source optical coherence tomography (SS-OCT) and measurement probe with integrated Mirau micro interferometer. The system consists pigtailed illumination blocks, connected via Gradient Index (GRIN) lens collimator to micro-opto-electro-mechanical systems (MOEMS) (4 mm × 4 20 mm). technology interferometer is vertical multi-wafer bonding approach. MOEMS...

A numerical model is proposed to simulate the isotropic wet etching of silicon through an aperture a mask produce microlenses molds. The process based on aqueous solutions HF and HNO3 in range concentrations where rate depends mostly mass-transfer effects. In considered case defined by diffusion F− ions (oxidized) surface. simulation built with finite element method (FEM) coupled level set (LSM). Our does not assume infinite reaction etched We investigate influence shape structures. 2D...

We present the preliminary design, construction and technology of a microoptical, millimeter-size 3-D microlens scanner, which is key-component for number optical on-chip microscopes with emphasis on architecture confocal microscope. The device relies vertical integration micromachined building blocks: top glass lid, silicon electrostatic comb-drive X-Y Z microactuators integrated scanning microlenses, ceramic LTCC spacer, bottom lid focusing microlens. All components are connected wafer...

This paper presents the optical design of a miniature 3D scanning system, which is fully compatible with vertical integration technology micro-opto-electro-mechanical systems (MOEMS). The constraints related to this strategy are considered, resulting in simple three-element micro-optical setup based on an afocal microlens doublet and focusing microlens, tolerant axial position inaccuracy. achieved by lateral displacement microlenses doublet, realized micro-electro-mechanical microactuators...

This Letter reports on the generation of glass-based axicons realized at wafer level by means microfabrication. The technique is based micro glass blowing allowing parallel fabrication numerous components a time. Blowing achieved due to cavities containing gas that expands when stack introduced in furnace. Such cavities, generated silicon and sealed bonded wafer, act as pistons pushing locally other side where micro-optical component profile emerges. After cavities' removal polishing, it...

We report a simple method, based on intensity measurements, for the characterization of wavefront and aberrations produced by micro-optical focusing elements. This method employs setup presented earlier in [Opt. Express 22, 13202 (2014)] measurements 3D point spread function, which basic phase-retrieval algorithm is applied. combination allows retrieval generated element and, addition, quantification optical through decomposition with Zernike polynomials. The requires only an in-motion...

Objective The zonal properties of articular cartilage critically contribute to the mechanical support and lubrication tissue. Current treatments for have yet regenerate this architecture, thus compromising functional efficacy repaired tissue leading degeneration in long term. In study, regeneration through bilayered implantation expanded autologous chondrocytes was investigated a porcine chondral defect model. Design Autologous extracted from non-weight bearing trochlea region knee were...

Integral field spectroscopy (IFS) is a well-established method for measuring spectral intensity data of the form s(x,y,λ), where x, y are spatial coordinates and λ wavelength. In most flavors IFS, there trade-off between sampling (x,y) measured wavelength band Δλ. Here we present first, to our knowledge, attempt overcome this by use computational imaging measurement diversity. We implement diversity including grating in design, which allows rotation dispersed spectra measurements. The raw...

We report the impact on imaging quality of mirror suspensions, referred to as spider legs, used support reference in a Mirau micro-interferometer that requires vertical alignment lens, mirror, and beamsplitter. Because light goes from microlens beamsplitter through plane, legs are source diffraction. This is studied function different parameters design. Imaging criteria, such resolution well symmetry system, determined using point spread modulation transfer pupil. These criteria determine...

This paper describes crucial technological aspects of development an optical, transmissive, vertically-integrated 3-D microscanner: chip-level bonding micro-optical components and wafer-level anodic deeply structurized substrates. We present two methods hybrid integration glass microlenses with fragile movable parts silicon microactuators, based on frit or direct thermal bonding, that have been experimentally validated in terms strength, compatibility change optical performance microlens....

This paper reports a batch-fabrication technique based on micromachining of silicon molds to create, after replication, arrays microlenses characterized by high fill factors. The for single microlens generation (compatible with various types replication or integration so that made plastics glass can be generated) was reported previously and showed its potential in terms range shapes cost. However, subtleties chemical etching makes more difficult the factor matrices when size overcomes...

This paper reports a monolithic fabrication of MEMS rotary stepper motor integrated with highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping which difficult attain classical like comb-drive design depends on the structural resonant frequency. micro-motor based flexure avoid frictional effects and getting maximum angular stroke. fabricated separately...

In this paper, we investigate the influence of different masking parameters onto surface quality {111} sidewalls in order to generate specifically deep cavities by wet-anisotropic-etching bulk silicon, for optical sensors using cavity as reflectors. Mask alignment with crystal planes prior wet-etching is found be essential avoid appearance additional during long etching. deposition processes have been also evaluated. Among employed mask materials, Cr/Au gives best results. It then shown that...

This paper presents the conception of a new micro-optical component fabricated within wafer-level approach: micromachined reflective objective, so-called micro-Schwarzschild characterized by superior optical performances than widespread microlenses. The system, made two vertically integrated mirrors, works in transmission similarly as While specific geometric configuration two-mirrors allows elimination most common aberrations, architecture provides inherent achromaticity. detail design and...

This study aimed to validate a Polish adaptation of the Basic Psychological Need Satisfaction and Frustration Scale (BPNS&FS) determine significance need satisfaction frustration for mental health. The scale measures basic psychological needs: autonomy, competence, relatedness. measurement these needs has an important role in explanation well-being risk disorders.The involved 792 participants (50% woman) 60 (67% men) alcohol addicted patients. We obtained translation equivalent original...