We present a one-dimensional (1D) theoretical model for the design analysis of micro thermal convective accelerometer (MTCA). Systematical was conducted on sensor performance covering output, sensitivity, and power consumption. The output further normalized as function input acceleration in terms Rayleigh number Ra (the product Grashof Gr Prandtl Pr) different fluids. A critical (Rac = 3,000) is founded, first time, to determine boundary between linear nonlinear response regime MTCA. Based...

We report, for the first time, a novel two-dimensional (2D) model micro thermal expansion-based gyroscope (μTEG) to predict sensor's performance, which has been validated by experimental results. Scaling analysis on performance characteristics this enables optimization of μTEG design, including normalized distances between heater and temperature detectors in two directions, thin film thickness, width, cavity depth temperature, achieve extremely high sensitivity (11.78 mV/°/s) low power...

A two-dimensional (2D) model was developed, for the first time, to describe characteristics of micromachined thermal expansion-based angular motion (TEAM) sensor, which has been validated by experimental results. Scaling analysis on performance through 2D conducted optimize TEAM sensor's design in terms normalized distances between microheaters and temperature detectors x y directions, thickness thin film, heater width, cavity depth, temperature. Furthermore, proposed two dimensionless...

In this letter, we report the temperature effect and noise characterization of Parylene-based capacitive humidity sensor which can be used for integrated CMOS compatible thermal comfort sensing. The is comprised a pair interdigitated Pt electrodes deposited on silicon substrate parylene hygroscopic layer coated using room chemical vapor deposition process. was characterized at different relative (RH) values working temperatures in testing setup. capacitance increases with RH due to...

We propose a novel transient PDE model for development of highly sensitive micro thermal expansion-based angular motion (μTEAM) sensors based on the study time-dependent response. With efficient prediction time constant (τ*) model, which is >2,200 times faster than 3D CFD simulation (32.67s versus >20h) and was validated by experimental results, parametric analysis has been conducted design optimization. The μTEAM with three pairs temperature detectors were adopted systematic PWM frequency (...

Abstract This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant micro-electro-mechanical system (MEMS) mirrors with cascaded structures. The time-dependent damping moment due viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures device frames. Nonlinear force induced by comb drives efficiently acquired based on hybrid method. optimized...

In this letter, we theoretically calculated the critical dimension for achieving minimum noise equivalent magnetic induction <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">(NEMI)</i> in a micro search coil magnetometer (μSCM) with an amplifier circuit. The μSCM consists of fabricated planar spiral on quartz wafer (to avoid parasitic capacitance effect) and optimized low-noise readout An analytical model was developed to study effect key...

For the first time, we present a two-dimensional theoretical model for one-dimensional comb-actuated MEMS mirror with cascaded structures. The numerical including different damping mechanisms and nonlinear capacitive force is validated experiment results. Stability analysis conducted to simulate hysteretic frequency response. proposed can be guideline designing multi-degree-of-freedom parametric-excited high large scan angle.

In this paper, we present a novel structural design of thermal expansion-based angular motion (TEAM) sensors based on systematic comparative study to improve the sensitivity. Compared with traditional TEAM sensor Heaters oriented Perpendicular temperature detectors (abbreviated PeH), employs Parallel (PaH). The dominant superiority is sensitivity enhancement without increasing chip area and power consumption, which can be attributed higher working efficiency heaters analysis proposed 2D...

For the first time, we propose a novel CMOS-MEMS staggered vertical comb based micro scanner (SVC-MS) for ID static out-of-plane rotation using CanSemiconductor 0.18μm IP6M, TSMC CMOS foundry process. Based on compact model, parametric analysis shows torsion spring width and actuator thickness are two critical parameters in term of design, design optimization dimensional can be conducted improving angle(Ooptical=19.26°) figure merit (FoM=O.6) by 400% 150% compared with design. The optimized...

For the first time, we designed and fabricated a Coriolis-force compensated micro thermal convective accelerometer (CMTCA), which could reduce Cross-axis sensitivity of double-aixs MTCA within 2% from 15%. In this design, couple compensation detectors are implemented for each master detectors. The used acceleration input detecting. By means novel structure, angular signal be monitored, to compensate cross-axis by processing circuit simultaneously. This design is quite meaningful improving...

In this paper, we report an advanced thermal expansion-based angular motion (TEAM) sensor with the competitive sub-deg/sec detection limit based on identified optimal heater voltage amplitude (V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">h</inf> ). Experimental results reveal major noise sources of TEAM mainly consist flicker and noise. Therein, is linearly proportional to V , while inversely frequency (f). Besides, sensitivity . Thus, a...

A novel CMOS-MEMS staggered vertical comb-based micro scanner using 0.18um 1P6M CMOS foundry process without wafer bonding has been successfully developed. compact model consisting of both numerical simulations and analytical solutions is used for rapid design optimization. An optimized with enhanced performance (rotation angle figure merit) as well a critical ratio improving actuators' input-output response proposed. The proposed can be very useful developing next-generation optical MEMS devices.

For the first time, an NL PDE (nonlinear partial differential equation)-based compact model to predict transient thermal behavior of a CMOS-compatible micro PCR (polymerase chain reaction) chip is proposed for rapid device optimization. The validated using experimental data with average error 0.4% and then employed explore effect crucial parameters on design. According parametric scaling analysis, two critical factors - thickness width heaters show dominant impacts performance, including...

In this paper, we propose a machine learning (ML)-based method to significantly improve the accuracy of micro-PMV (Predicted Mean Vote) sensor system for Human Thermal Comfort (HTC) measurements. According analysis, an accurate prediction metabolic rate is critical determine reliable PMV values. Therefore, compared previous work, have divided indoor human activities into more categories (9 vs 3) which cover wider range typical scenarios address limitation estimation. A Random Forest ML model...

Early cancer diagnosis, critical to the increase survival rate of patients, is still challenging although date more than 745,000 relevant published research articles (Google Scholar database) and 346,000 (PubMed database). In recent years, detection Circulating Tumor Cells (CTCs) from patients' blood samples using microfluidics a popular non-invasive method for diagnosis therapy monitoring cancer. However, translation microfluidic CTC devices practical system in clinics because significant...