A5056731101- Acoustic Wave Resonator Technologies
- Ferroelectric and Piezoelectric Materials
- Mechanical and Optical Resonators
- GaN-based semiconductor devices and materials
- Photorefractive and Nonlinear Optics
- Advanced Sensor and Energy Harvesting Materials
- Electronic and Structural Properties of Oxides
- Multiferroics and related materials
- Advanced MEMS and NEMS Technologies
- Electrophoretic Deposition in Materials Science
- Perovskite Materials and Applications
- Advanced Battery Technologies Research
- Surface Roughness and Optical Measurements
- Semiconductor materials and devices
- Advancements in Battery Materials
- Photonic and Optical Devices
- Dielectric materials and actuators
- Gas Sensing Nanomaterials and Sensors
- Conducting polymers and applications
- Electromagnetic wave absorption materials
- Microwave Engineering and Waveguides
- Analytical Chemistry and Sensors
- Organic Electronics and Photovoltaics
- Effects and risks of endocrine disrupting chemicals
- Terahertz technology and applications
CEA LETI
2013-2025
CEA Grenoble
2013-2025
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
2013-2025
Université Grenoble Alpes
2013-2025
Centre National de la Recherche Scientifique
2010-2024
Université de Bordeaux
2014-2024
Institut Polytechnique de Bordeaux
2024
Laboratoire de Chimie des Polymères Organiques
2014-2024
Institut de Chimie de Clermont-Ferrand
2024
Institut polytechnique de Grenoble
2013-2023
This study reports on the determination of optical constants a lead-free ferroelectric material, Na0.5Bi0.5TiO3. The transmission measurements were carried out in 300–3000 nm wavelength range, (100)-oriented Na0.5Bi0.5TiO3 thin film, epitaxially grown by laser ablation (100)MgO single crystal substrate. Applying “method envelopes,” developed Manifacier et al. [J. Phys. E 9, 1002 (1976)] and Swanepoel 16, 1214 (1983)], analysis observed interference fringes allowed extracting some data for...
5G standards implementation drive significant challenges at the acoustic filter level and requires innovative solutions. A promising approach relies in Surface Acoustic Waves technology combined with a thin LiTaO3 piezoelectric crystal layer bonded on Silicon substrate - so called POI-substrate, but suffers from volume manufacturing solution. We will report how Smart Cut™ transfer enables it.
Bisphenol (BP) structural analogues of BPA are widely used. Previous studies showed similar effects and BPS on reproduction in several species including human. We hypothesised that the bisphenols (BPs) could accumulate granulosa cells (GCs) affects steroidogenesis. This study investigated seven BP their equimolar cocktail human (hGC) assessed BPA, BPS, BPF BPAF level exposures follicular fluid 277 women undergoing Assisted Reproductive Technology. The hGCs were recovered after oocyte...
Surface acoustic wave devices are key components for processing radio frequency signals in wireless communication because these offer simultaneously high performance, compact size and low cost. The optimization of the device structure requires a quantitative understanding energy conversion loss mechanisms. Here we use stroboscopic full-field diffraction x-ray microscopy to reveal an unanticipated prototypical one-port resonator device. A non-uniform excitation active area was responsible...
The diagnosis of ovarian torsion is made with delay among pre-pubertal girls and the management after surgical detorsion poorly codified. We interested in French experience during last two decades. Retrospective study pediatric surgery centers from January 2000 to December 2022 concerning who presented at least 1 episode prepubertal period. Data collected included patient history, symptomatology, biological imaging assessment first episode, emergency surgery, follow-up including recurrence....
We report the electrical properties, measured both at macroscopic and nanometric scales, of epitaxial (110)-Na0.5Bi0.5TiO3 (NBT) thin films grown on (110)Pt/(110)SrTiO3 by pulsed laser deposition (PLD). The influence A-site composition (Na and/or Bi excess) structural/microstructural characteristics properties is discussed. Whatever NBT target, final layers are systematically epitaxially grown, with crystallites mainly (110)-oriented, as well (100)-oriented for some minor proportion. Atomic...
Bulk Acoustic Wave Resonators made of lithium niobate thin films obtained by layer transfer techniques relied so far only on full sheet buried electrodes, what is impractical in vue proper filter implementations. In this work, we introduced patterned bottom electrodes and a sacrificial cavity along with Smart CutTM process. We demonstrate Film (FBAR) resonance frequencies the 2.4 GHz range, electromechanical coupling factors excess 39 % quality above 250. This paves way for introducing high...
In this paper, Y+163°-cut LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> (LNO) Film Bulk Acoustic Resonators (FBAR) with patterned bottom electrodes (AlSi or W) and a sacrificial layer cavity have been fabricated using transfer process (4-inch). Unlike previous work based on films oriented towards the X axis [1], Y+163° orientation provides single resonance at 2.2 GHz, an effective electromechanical coupling factor (k...
High quality single crystal LiTaO3 thin film transfer using Smart Cut™ technology has been demonstrated. Piezo On Insulator (POI) characteristics were optimized to the benefit of guided SAW resonator performance. We will correlate these substrate parameters with some key figures merit devices in terms frequency control, k2, Q factor.
In this work, Film Bulk Acoustic Resonators (FBAR) based on 250 nm-thick Y+163°-cut LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> films have been fabricated using a layer transfer process (4-inch) including patterned bottom electrodes and sacrificial cavity. As previously reported, orientation provides single resonance, whose frequency is here pushed up to 4.78 GHz due the reduced piezoelectric film thickness. The effective...
Epitaxial Na0.5Bi0.5TiO3 thin films presenting various thicknesses were grown by pulsed laser deposition on epitaxial (100) platinum bottom layers supported (100)MgO single crystal substrates. X-ray diffraction data indicated that all are single-phased and (100)-oriented (NBT) crystallites extremely predominant. The thinner (respectively 230 400 nm) display a quasiunique orientation (close to 100%), whereas for the thickest film (610 nm), proportion of decreases 85.50 vol %. Such variation...
Mn-doped ZnO thin films with different percentages of Mn content (0, 1, 3 and 5 at%) substrate temperature 350 °C, were deposited by a simple ultrasonic spray pyrolysis method under atmospheric pressure. The chemical compositions surface morphologies examined dispersive x-ray spectroscopy scanning electron microscopy micrographs. We have studied the structural optical properties using diffraction (XRD), Raman spectroscopy, Fourier transform infrared ultra-violet visible near-infrared...
This paper presents a generic representation of the six switching sequences dc-dc converters based on piezoelectric resonators. In addition, estimation current density and voltage limitations lead zirconate titanate lithium niobate resonators are given. A comparison between these materials is carried out. Then, we propose niobate-based resonator design that reduces spurious modes, while providing quality factor 3700 an electromechanical coupling k <inf...
Low band-gap π-conjugated copolymers based on squaraine units can be synthesized through classical Suzuki and Stille cross-coupling reactions (in blue), or a metal-free polycondensation green).
We have designed and fabricated LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> Film Bulk Acoustic Resonators operating around 4.2 GHz, suitable for C-band filters, with various bandwidths (60, 170, 300 500 MHz). They are based on common crystal cuts the excitation of longitudinal waves (Z, Y+64° Y+36°cuts) shear (Y+163°-cut). Electromechanical coupling factors 3.5, 9.2, 15.4 24% were respectively obtained. Electrodes piezoelectric...
Abstract A versatile industrial recipe of transferring nitride microelectronic components such as micro‐electromechanical systems (MEMS) onto flexible and stretchable substrates is demonstrated. This method bypasses difficulties temperature‐related processing, applicable to large‐scale mass production. The technological process fabrication presented along with its underlying structural radio‐frequency characterizations. In particular, the Raman strain shifts aluminum (AlN) thin films are...
Abstract Li‐ion battery performance relies fundamentally on modulation at the microstructure and interface levels of composite electrodes. Correspondingly, binder is a crucial component for mechanical integrity electrode, serving to interconnect active material conductive additive firmly attach this current collector. However, commonly used poly(vinylidenefluoride) (PVDF) presents several limitations, including use toxic solvent during processing, low electrical conductivity which...
Artificial superlattices of ferroelectric Bi0.5Na0.5TiO3 and BaTiO3 have been successfully grown on (001) insulator or conductive SrTiO3 substrates by pulsed laser deposition. In these epitaxial layered structures, the layers were shown to contribute an improvement two dimensional growth layers. The influence superlattice period Λ, between 5 20 nm, was investigated. We observe increase in in-plane tensile strain as Λ is reduced from nm 10 accompanied a decrease density dislocations. A...
Film bulk acoustic wave resonators (FBAR) based on LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> single crystal piezoelectric films offer promising perspectives towards wide bandwidth filters. We present the Y+36° orientation, which promotes excitation of longitudinal waves. This allows reaching resonance frequencies 4.3 GHz for 600 nm-thick films, with electromechanical coupling factors 21.4%, quality 255 and impedance ratios...
We have designed and fabricated Y+36°-cut LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> Film Bulk Acoustic Resonators (FBAR) compatible with the n79 band. Leveraging longitudinal waves an energy trapping condition, a single-mode resonance is obtained at 4.7 GHz, effective electromechanical coupling coefficient (kt <sup xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) of 25 % quality factor antiresonance (Q...
This work presents an improved method for measuring the direct piezoelectric voltage and energy of flexible polymers. Well-controlled stress is applied with a four-point bending system measured in real open-circuit conditions. The presented separates part from measurement by introducing mechanical switch, allowing instantaneous post-deformation discharge measurements. Oscilloscope contact-less electrostatic voltmeter are compared. Direct measurements under conditions have been performed on...
The competition for the development of radio-frequency filters is still increasing with imminence new telecommunication standard commercialization. Although investigated years without real commercial breakthrough, combination piezoelectric films on Silicon now receiving a very strong interest. In this contribution, we present capability Smart-Cut Piezo-On-Insulator (POI) substrates combining Lithium Tantalate and developed by SOITEC design manufacturing SAW filters. We particularly focus one...
Thin films of the lead-free ferroelectric Na0.5Bi0.5TiO3 grown on thin-film Pt electrodes supported by SrTiO3 substrates have a complex microstructure consisting crystalline grains with three distinct major crystallographic orientations. The piezoelectric response measured in spatially separated sub-micron using time-resolved synchrotron x-ray microdiffraction is highly inhomogeneous even among sharing same orientation. coefficient d33 varies nearly factor two series areas 〈001〉...
SummaryWe report hybrid SAW/BAW resonators based on arrays of AlN/Mo transducers located atop a silicon substrate. Thanks to an optimized fabrication process, these devices exhibit quality factors up 3,900 and 1,700 respectively for the pseudo-SAW pseudo-BAW modes, at frequencies close 600 MHz 2.9 GHz.