A5066810360- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Force Microscopy Techniques and Applications
- Acoustic Wave Resonator Technologies
- Nanofabrication and Lithography Techniques
- Photonic and Optical Devices
- Analytical Chemistry and Sensors
- Metal and Thin Film Mechanics
- Microfluidic and Capillary Electrophoresis Applications
- Nanowire Synthesis and Applications
- Advanced Surface Polishing Techniques
- Immune Cell Function and Interaction
- Microwave Engineering and Waveguides
- Advanced Electron Microscopy Techniques and Applications
- Gas Sensing Nanomaterials and Sensors
- Near-Field Optical Microscopy
- Silicon Nanostructures and Photoluminescence
- Sensor Technology and Measurement Systems
- Additive Manufacturing and 3D Printing Technologies
- Anodic Oxide Films and Nanostructures
- Polymer Surface Interaction Studies
- 3D IC and TSV technologies
- Catalysis and Hydrodesulfurization Studies
- Advanced Energy Technologies and Civil Engineering Innovations
- Magnetic properties of thin films
Soka University of America
2024
Danish Technological Institute
2012-2022
Technical University of Denmark
2003-2014
Ørsted (Denmark)
2012-2014
Northern Arizona University
2010
University of New Orleans
2007
Electronic Product Services (Czechia)
2005
We report on a novel fabrication process and preliminary characterization of nanomechanical resonating device, which is to be used for mass detection. The the device based laser lithography Al coated SiO2/p++Si/SiO2/Si structures, followed by dry wet etching. have fabricated highly doped polysilicon free-hanging cantilevers anchored drivers lateral cantilever vibration, where motion parallel substrate. are actuated electrically applying an ac voltage between driver. laterally vibrating...
A simple linear electromechanical model for an electrostatically driven resonating cantilever is derived. The has been developed in order to determine dynamic quantities such as the capacitive current flowing through cantilever-driver system at resonance frequency, and it allows us calculate static magnitudes position voltage of collapse or versus deflection characteristic. used demonstrate theoretical sensitivity on attogram scale a mass sensor based nanometre-scale cantilever, analyse...
Microwave-assisted heterogeneous catalysis (MHC) is gaining attention due to its exciting prospects related selective catalyst heating, enhanced energy-efficiency, and partial inhibition of detrimental side gas-phase reactions. The induced temperature difference between the comparatively colder surrounding reactive atmosphere pointed as main factor process selectivity enhancement towards products interest in a number hydrocarbon conversion processes. However, MHC traditionally restricted...
In this paper, we report on the main aspects of design, fabrication, and performance a microelectromechanical system constituted by mechanical submicrometer scale resonator (cantilever) readout circuitry used for monitoring its oscillation through detection capacitive current. The CMOS is monolithically integrated with technology that allows combination standard processes novel nanofabrication methods. constitutes an example submicroelectromechanical to be as cantilever-based mass sensor...
We have fabricated Al nanocantilevers using a simple, one mask contact UV lithography technique with lateral and vertical dimensions under 500 100 nm, respectively. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Furthermore, it is shown that has potential higher sensitivity than Si based sensors. Initial testing of these been conducted scanning electron microscope setup were the tested high vacuum conditions. The Q factor was measured...
Although micromechanical sensors enable chemical vapor sensing with unprecedented sensitivity using variations in mass and stress, obtaining selectivity the response still remains as a crucial challenge. Chemoselectivity detection immobilized selective layers that rely on weak interactions provides only partial selectivity. Here we show very low thermal of can be used to produce unique responses for achieving without losing or reversibility. We demonstrate this method is capable...
We experimentally demonstrate the effect of localized surface plasmon resonance (LSPR) a single gold nanoparticle (AuNP) 100 nm in diameter on mechanical frequency free-standing silicon nitride membrane by means optomechanical transduction. discover that key to explain coupling these systems is extinction cross section enhancement due excitation LSPR at selected wavelengths. In order validate this coupling, we have developed fixed wavelength interferometric readout system with an integrated...
Here we present a thermophysical technique that is capable of differentiating vapor phase adsorbed explosives from nonexplosives and additionally individual species common explosive vapors. This utilizes pairs suspended microfabricated silicon bridges can be heated in controlled fashion. The differential thermal response the with without shows unique reproducible characteristics depending on nature explosives. tunable heating rate method described here providing signals for subnanogram...
In the framework of development an ultrasensitive microfabricated mass sensor for distributed sensing applications we present a bulk resonator-based sensor. The two devices presented are based on polysilicon disk resonating at 132 and 66 MHz, respectively, actuated electrostatically in wine-glass mode. By using mode resonators it has been possible to reduce thickness layer without affecting resonance frequency, reaching extremely high frequency shift sensitivity 11.3 kHz µm2 fg−1 markedly...
Arrays consisting of nanosized stripes Permalloy with different length-to-width ratios have been fabricated using electron beam nanolithography, magnetron sputtering, and lift-off process. These a thickness 100nm, width 300nm, lengths ranging from 300nmto100μm. The are separated by distance 1μm. Magnetization hysteresis loops were measured superconducting quantum interference device susceptometer. Microwave absorption at 9.8GHz was determined means ferromagnetic resonance technique....
The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach detecting the deflection functionalized cantilever is proposed. It consists change electrochemical current level when voltage applied between deflecting cantilever, acting as one electrodes, reference fixed electrode placed close proximity to free extreme cantilever. detection possible since distance two electrodes smaller than 50 nm. fabricated by...
We have fabricated an ultrasensitive nanomechanical resonator based on the extensional vibration mode to weigh adsorbed water self-assembled monolayers of DNA as a function relative humidity. The adsorption isotherms provide number molecules per nucleotide for single stranded (ss) and after hybridization with complementary strand. Our results differ from previous data obtained bulk samples, showing genuine behavior these monolayers. cannot be inferred due low efficiency highly packed...
A direct-write laser system and an atomic force microscope (AFM) are combined to modify thin layers of aluminum on oxidized silicon substrate, in order fabricate conducting robust etch masks with submicron features. These very well suited for the production nanoelectromechanical systems (NEMS) by reactive ion etching. In particular, laser-modified areas can be subsequently locally AFM regions selectively removed chemical This provides a straightforward means define overall structure device...
A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. mass sensitivity of 100 Hz/fg (1 fg=10−15 g) obtained from the preliminary experiments where a minute deposited on device by means focused ion beam. The total noise currently applied measurement system allows for minimum detectable 0.5 fg air.