A5053512100- Advanced X-ray Imaging Techniques
- Calibration and Measurement Techniques
- Advanced Measurement and Metrology Techniques
- Optical measurement and interference techniques
- Advanced X-ray and CT Imaging
- Advancements in Photolithography Techniques
- Adaptive optics and wavefront sensing
- Plant Water Relations and Carbon Dynamics
- Optical Systems and Laser Technology
- Advanced optical system design
- Ecology and Vegetation Dynamics Studies
- Infrastructure Resilience and Vulnerability Analysis
- Climate variability and models
- Astronomy and Astrophysical Research
- Electron and X-Ray Spectroscopy Techniques
- Photocathodes and Microchannel Plates
- Agriculture Sustainability and Environmental Impact
- Geographic Information Systems Studies
- Medical Imaging Techniques and Applications
- Fire effects on ecosystems
- Integrated Circuits and Semiconductor Failure Analysis
- Global Energy and Sustainability Research
- Botany and Plant Ecology Studies
- History and Developments in Astronomy
- Advanced Sensor Technologies Research
Sandia National Laboratories California
2022-2023
University of Arizona
1999-2013
Brookhaven National Laboratory
1999
Lawrence Berkeley National Laboratory
1998
Argonne National Laboratory
1996
University of Illinois Chicago
1996
Modifications of the long trace profiler at Advanced Photon Source Argonne National Laboratory have significantly improved its accuracy and repeatability for measuring figure large flat long-radius mirrors. Use a Dove prism in reference beam path corrects phasing problems between mechanical errors thermally induced system errors. A single correction now completely removes both these error signals from measured surface profile. The addition precision air conditioner keeps temperature...
Limited access to transmission lines after a major contingency event can inhibit restoration efforts. After Hurricane Maria, for example, flooding and landslides damaged roads thus limited travel. Transmission are also often situated far from maintained roadways, further limiting the ability repair them. Therefore, this paper proposes methodology assessing Puerto Rico’s infrastructure (i.e., lines) identify potentially hard reach areas due natural risks or distance roads. The approach...
The phase-shifting point diffraction interferometer (PS/PDI) has recently been developed and implement at Lawrence Berkeley National Laboratory to meet the significant measurement challenge of characterizing extreme UV (EUV) projection lithography systems. Here progress on characterization PS/PDI accuracy is presented. Two major classes errors affect interferometer: first being systematic effects arising from geometry, second random caused by an imperfect reference wave. In order...
Recent experiments with four 10x EUV imaging systems provide the first direct comparisons of visible-light and at- wavelength interferometers performed using state-of- the-art measurement tools that will be used to assemble align next generation systems. Measurements from individual multilayer-coated Schwarzschild objectives are discussed. Favorable agreement has been achieved between system wavefront measurements in all optical made presence surface contamination multilayer thickness...
A Modifications made to the Long Trace Profiler (LTP II) system at Advanced Photon Source Argonne National Laboratory have significantly improved accuracy and repeatability of instrument The use a Dove prism in reference beam path corrects for phasing problems between mechanical efforts thermally-induced errors. single correction now completely removes both error signals from measured surface profile. addition precision air conditioner keeps temperature metrology enclosure constant within...
We will present a system to perform closed-loop optical tests of the 64 cm diameter, 336 actuator adaptive secondary made at Steward Observatory Mirror Laboratory. Testing include Shack-Hartmann wavefront sensing and modal correction static dynamic aberrated wavefronts. The test is designed so that experiments can be with both focal plane instrument installed in their normal configuration MMT, or same 9 m spacing laboratory tower. convex illuminated incidence through two 70 diameter lenses...
Natural hazards, like wildfires, present various challenges to the electric grid that can leave many communities without power. To identify vulnerabilities in and corresponding at-risk communities, this work considers implementation of two topological assessment approaches, namely betweenness centrality minimum cut, combines results from each with spatial fire probability data. The a analysis identified whose critical lines, necessary for routing power community numerous generators, were...
Recent improvements in extreme ultraviolet (EUV) lithographic imaging with Schwarzschild objectives have come as a direct result of at-wavelength interferometric characterization the phase-shifting point diffraction interferometer. High accuracy system wave front has led to determination best objective and subaperture configuration. These investigations results experiments are discussed. Two pinhole null tests provided an situ method demonstrating reference wavefront ∼λEUV/300.
Modifications made to the Long Trace Profiler (LTP II) system at Advanced Photon Source Argonne National Laboratory have significantly improved accuracy and repeatability of instrument. The use a Dove prism in reference beam path corrects for phasing problems between mechanical errors thermally-induced errors. A singe correction now completely removes both error signals from measured surface profile. addition precision air conditioner keeps temperature metrology enclosure constant within +/-...
Steward Observatory is completing the manufacture of a deformable f/15 secondary mirror for 6.5m Multiple Mirror Telescope conversion that will, along with wavefront sensing system, compensate atmospheric turbulence. A potential difficulty an adaptive ability to verify commanded shapes large convex surface. An optical design presently being implemented test mirror's closed loop control system by optically projecting artificial star simulate starlight in actual telescope. The has been...
A phase-shifting point diffraction interferometer (PS/PDI) has recently been developed to evaluate optics for extreme ultraviolet (EUV) projection lithography systems. The implemented at the Advanced Light Source Lawrence Berkeley National Laboratory and is currently being used test experimental EUV Schwarzschild objectives. Recent PS/PDI measurements indicate these objectives have wavefront errors on order of 0.1 waves (∼1 nm a wavelength 13.4 nm) rms. These at-wavelength also revealed...
Extreme ultraviolet (EUV) projection lithography is currently being developed to achieve sub-100 nm critical dimension pattern transfer. Such severe performance requirements place unprecedented demands on phase measuring interferometry which must provide a measurement accuracy of ~ 1 Å based acceptable wavefront tolerances ~2 Å. Furthermore, since these systems utilize resonant reflective structures, the be performed at operational wavelength, in 5 15 range.
Bonding of silicon directly to is possible with proper preparation the two surfaces be bonded. The advantage such a method that bonding agent not required, and direct avoids figure errors introduced by thickness variations in agent. We have succeeded 3-inch-diameter diced (1 mm × 1 mm) silicon(111) oriented wafer concave spherical form having 3-m radius. A very good rms error 0.059 millirad over entire area analyzer was measured. suitability for x-ray inelastic scattering due strain is,...
The Advanced Photon Source (APS) Metrology Laboratory is now operational in its permanent location a cleanroom environment on the Experiment Hall floor of APS site. will provide characterization figure and finish x-ray optical surfaces for user community using visible light instrumentation. Three noncontact instruments are available measuring surface features with lateral resolution from less than micron to lengths 2 meters vertical as small an Angstrom. This paper gives brief description...
Modifications made to the Long Trace Profiler (LTP II) system at Advanced Photon Source Argonne National Laboratory have significantly improved accuracy and repeatability of instrument. The use a Dove prism in reference beam path corrects for phasing problems between mechanical errors thermally-induced errors. A single correction now completely removes both error signals from measured surface profile. addition precision air conditioner keeps temperature metrology enclosure constant within +...