Spherical silicon nanoparticles with sizes of a few hundreds nanometers represent unique optical system. According to theoretical predictions based on Mie theory they can exhibit strong magnetic resonances in the visible spectral range. The basic mechanism excitation such modes inside is very similar that split-ring resonators, but one important difference have much smaller losses and are able shift resonance wavelength down frequencies. We experimentally demonstrate for first time these...

Abstract Recently, metasurfaces have received increasing attention due to their ability locally manipulate the amplitude, phase and polarization of light with high spatial resolution. Transmissive based on high‐index dielectric materials are particularly interesting low intrinsic losses compatibility standard industrial processes. Here, it is demonstrated numerically experimentally that a uniform array silicon nanodisks can exhibit close‐to‐unity transmission at resonance in visible...

The numerical aperture (NA) of a lens determines its ability to focus light and resolving capability. Having large NA is very desirable quality for applications requiring small light–matter interaction volumes or angular collections. Traditionally, based on refraction requires precision bulk optics that ends up being expensive thus also specialty item. In contrast, metasurfaces allow the designer circumvent those issues producing high-NA lenses in an ultraflat fashion. However, so far, these...

Localized optical resonances in metallic nanostructures have been increasingly used color printing, demonstrating unprecedented resolution but limited gamut. Here, we introduce a new nanostructure design, which broadens the gamut while retaining print resolution. Instead of metals, silicon that exhibit localized magnetic and electric dipole were fabricated on substrate coated with Si3N4 index matching layer. Index allows suppression effects, thus enabling Kerker's conditions to be met, is,...

We report on a planar metamaterial, the resonant transmission frequency of which does not depend polarization and angle incidence electromagnetic waves.The resonance results from excitation high-Q antisymmetric trapped current mode shows sharp phase dispersion characteristic to Fano-type resonances electromagnetically induced transparency phenomenon.

Polarization is a key property defining the state of light. It was discovered by Brewster, while studying light reflected from materials at different angles. This led to first polarizers, based on Brewster's effect. Now, one trends in photonics study miniaturized devices exhibiting similar, or improved, functionalities compared with bulk optical elements. In this work, it theoretically predicted that properly designed all-dielectric metasurface exhibits generalized effect potentially for any...

Lithium niobate (LN) has experienced significant developments during past decades due to its versatile properties, especially large electro-optic (EO) coefficient. For example, bulk LN-based modulators with high speeds and a superior linearity are widely used in typical fiber-optic communication systems. However, ever-increasing demands for signal transmission capacity, the power size of devices pose great challenges, when one counterparts, integrated silicon photonics, dramatic recent...

In this article, we investigate higher order (quadrupolar, octupolar, hexadecapolar, and triakontadipolar) Fano resonances generated in disk ring (DR) silver plasmonic nanostructures. We find that the are when size of is reduced falls into a certain range. With dual-disk (DDR) nanostructures, rich set tunable line shapes provided. More specifically, report our observations on optical behavior DDRs including asymmetric cases either two disks with different sizes or their locations inside...

Abstract A micromachined reconfigurable metamaterial is presented, whose unit cell consists of a pair asymmetric split‐ring resonators (ASRRs); one fixed to the substrate while other patterned on movable frame. The and supporting structures (e.g., microactuators, anchors, frames, etc.) are fabricated silicon‐on‐insulator wafer using deep reactive‐ion etching (DRIE). By adjusting distance between two ASRRs, strength dipole–dipole coupling can be tuned continuously actuators this enables...

The passage of a free-electron beam through nano-hole in periodically layered metal/dielectric structure creates new type tuneable, nanoscale radiation source - 'light-well'. With lateral size just few hundred nanometers, and an emission intensity ~200 W/cm^2 such light-wells may be employed nanophotonic circuits as chip-scale sources, or densely packed ensembles for optical memory display applications.

Wavefront manipulation in metasurfaces typically relies on phase mapping with a finite number of elements. In particular, discretized linear profile may be used to obtain beam bending functionality. However, discretization limits the applicability this approach for high angle due drastic efficiency drop when is mapped by small work, we discuss novel concept energy redistribution diffraction gratings and its application visible spectrum range, which helps overcome constraints ultrahigh (above...

Abstract A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional devices in ultrathin form. Various metasurface-based optical – coined as flat optics have been realized with distinction performances research laboratories using electron beam lithography. To make such mass producible at low cost, metasurfaces over large area also defined lithography steppers and scanners, which are commonly semiconductor foundries. This work reviews the process...

We demonstrate a new class of "coherent" metamaterials, where regular ensemble meta-molecules shows collective, i.e. coherent, narrow band resonant response, while disordering the leads to broadening and eventually disappearance resonance. draw parallels between observed collective behavior Mossbauer effect notice certain remarkable similarities with phase transitions ferromagnetic systems.

A hemodynamic Lab-on-a-chip system was developed in this study. This has two unique features: (1) it consists of a microfluidic network with an array endothelial cell seeding sites for testing them under multiple conditions, and (2) the flow rate frequency culture medium microchannel are controlled by pulsation free pump to mimic profile blood vessel different physiological conditions. The investigated conditions were: resting condition normal shear stress 15 dyne cm−2 heart 70 bpm,...

The demonstration of a color display metasurface on 12-inch silicon wafer with critical dimension (CD) below 100 nm by complementary metal-oxide semiconductor (CMOS) compatible technology is reported for the first time. 193 ArF deep UV immersion lithography leveraged instead electron beam (EBL) to pattern metasurface, which greatly improves efficiency while keeping high resolution. demonstrated successfully generates resonant modes and reflects lights at resonance wavelengths, giving its in...

Abstract Metasurface-based beam deflector, as an important optical element to bend the light propagation direction, has drawn a lot of interests in research achieve miniaturization devices and reduction system complexity. Based on 12-inch immersion lithography technology, this work, ultra-thin large-area pixelated metasurface deflector with footprint 2500 × μm, formed by nanopillars diameters from 221 396 nm, is demonstrated glass wafer. The 21 array deflectors designed input different...

A hybrid metal-dielectric nanoantenna promises to harness the large Purcell factor of metallic nanostructures while taking advantage high scattering directivity and low dissipative losses dielectric nanostructures. Here, we investigate a compact that is inspired by Yagi-Uda design. It comprises gold bowtie feed element three silicon nanorod directors, exhibiting unidirectional in-plane potential beam redirection capability in visible spectral range. The entire device has footprint only 0.38...

Abstract Metalenses made of artificial sub-wavelength nanostructures have shown the capability light focusing and imaging with a miniaturized size. Here, we report demonstration mass-producible amorphous silicon metalenses on 12-inch glass wafer via complementary metal-oxide-semiconductor compatible process. The measured numerical aperture fabricated metalens is 0.496 spot size 1.26 μm at wavelength 940 nm. applied in an system to test resolution. minimum bar resolution chart width 2.19...

Abstract All-dielectric nanophotonics lies at a forefront of nanoscience and technology as it allows to control light the nanoscale using its electric magnetic components. Bulk silicon does not experience any response, nevertheless, we demonstrate that metasurface made parallelepipeds excite dipole moment leading broadening enhancement absorption. Our investigations are underpinned by numerical predictions experimental verifications. Also surprisingly found resonant quadrupole leads...

We demonstrate NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detectors. The detectors are fabricated 8-inch wafer level technology with 12 % Sc-doped AlN deposited at a temperature of ∼200 °C. Together blackbody thermal emitter, 10 cm long enclosed channel only inlet and outlet holes connected to tubings, testing 2 different reference gases (N2 synthetic air), measurements show voltage signal drop due absorption the 4.26 μm wavelength concentrations ranging from...