Abstract Pixelation occurs in many imaging systems and limits the spatial resolution of acquired images. This effect is notably present quantum experiments with correlated photons which number pixels used to detect coincidences often limited by sensor technology or acquisition speed. Here, we introduce a pixel super-resolution technique based on measuring full spatially-resolved joint probability distribution (JPD) spatially-entangled photons. Without shifting optical elements using prior...

Single-photon light detection and ranging (LiDAR) is a key technology for depth imaging through complex environments. Despite recent advances, an open challenge the ability to isolate LiDAR signal from other spurious sources including background jamming signals. Here we show that time-resolved coincidence scheme can address these challenges by exploiting spatio-temporal correlations between entangled photon pairs. We demonstrate photon-pair-based distill desired information in presence of...

This paper presents a design and experimental evaluation of micro-electro-mechanical system biaxial resonant accelerometer with two-stage microleverage mechanisms. The device incorporates two pairs double-ended tuning fork resonators coupled to single proof mass. mechanisms possess higher amplification factor than single-stage mechanisms, so that the proposed has high level sensitivity. In addition, low cross-axis sensitivity is realized because decoupling beams. theoretically analyzed then...

Single-photon-avalanche diode (SPAD) arrays are essential tools in biophotonics, optical ranging and sensing quantum optics. However, their small number of pixels, low efficiency fill factor have so far hindered use for practical imaging applications. Here, we demonstrate full-field entangled photon pair correlation using a 100-kpixels SPAD camera. By measuring coincidences between more than 500 million pairs positions, retrieve the full point spread function system subsequently...

This paper describes an electrostatic charge sensor based on a microelectromechanical systems (MEMS) resonator with dual micro-levers to improve sensitivity. The device comprises double-ended tuning fork resonant element working at out-of-phase mode quality factor (Q) of about 4900 under operating pressure 40 mTorr. frequency shifts in proportion axial force induced by additions and then transformed amplification over 8. measured responsivity is 1.3×10−3 Hz/fC2, which matches well the...

A micro-resonant electrometer with the scheme of sensitivity manipulation is proposed to realize high resolution and large dynamic range based on a mechanical resonator actuator. As key sensing element, double-ended tuning fork has quality factor close 10 000 low motional resistance below 0.5 MΩ. Electrical nonlinear features are investigated. The charge functionality axial strain modulation calibrated 2.6 fC under 0.46 ppm frequency fluctuation. With manipulation, linearized from quadratic...

We present an analog silicon photomultiplier (SiPM) based on a standard 55-nm Bipolar-CMOS-DMOS (BCD) technology. The SiPM is composed of 16 × single-photon avalanche diodes (SPADs) and measures 0.29 0.32 mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^{2}$</tex-math></inline-formula> . Each SPAD cell passively quenched by monolithically integrated 3.3 V thick oxide transistor. measured gain 3.4 10...

A resonant electrostatic charge sensor with high sensitivity based on micro electromechanical systems (MEMS) technology is proposed to measure electric charge. Input produces lateral force change effective stiffness of double-ended tuning forks resonator, and leads a frequency shift. The the 4.4 × 10−4 Hz fC−2. sensing scheme perturbation has higher than traditional axial strain methods. Experimental results show that modulation better resolution stability amplitude modulation. also creates...

Time-resolved non-line-of-sight (NLOS) imaging based on single-photon avalanche diode (SPAD) detectors have demonstrated impressive results in recent years. To acquire adequate number of indirect photons from a hidden scene the presence overwhelming amount early-arrival photons, single-gated SPAD is widely employed to mitigate pile-up. However, additional prior knowledge range and relay surface profile are required preset gating position implement reconstruction. With this work, we propose...

In this article the dynamic behavior of clamped-clamped micromachined mechanical resonators working at a frequency 150kHz was characterized by electrostatic excitation and detection via both capacitive coupling optical methods. The experimental results measurement show that system behaved very much like simple harmonic oscillator low actuation levels while significant nonlinearity observed higher levels. identified as “spring softening” type occurred when product dc bias voltage ac driving...

This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The comprises two symmetrically-distributed double-ended tuning fork (DETF) resonators, each of which connects dual micro-leverage micro-leverages amplify electrostatic force in opposite directions cause frequency shift the resonators. Both resonators show similar trend behaviors electrical mechanical nonlinearity. Effect...

This paper reports a miniature system for detection of airborne particulate matter (PM), which contains virtual impactor and quartz crystal microbalance (QCM) resonant sensor. Silicon dioxide powders with diameter in the range from 0.5 to 8 μm are successfully separated by according their size. PM concentration chamber is measured proposed monitoring experimental results show that frequency QCM turns downward linearly mass loading increasing. The can complete measurement 35 μg/m3 only 23 seconds.

This paper reports a novel resonant electrometer with resolution of sub-1 femto coulomb, in which scheme adjustable sensitivity is firstly proposed to realize both high and large dynamic range. A double-ended tuning fork resonator utilized as the charge sensing element, an electrostatic comb-drive actuator used adjust sensitivity. The maximum was found be 1.03×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-2</sup> Hz/fC...

A resonant electrostatic charge sensor with high sensitivity based on micro electromechanical system technology is proposed to measure electric charge. During measurement, input produces lateral force change effective stiffness of double-ended tuning forks resonator, and lead a frequency shift. The sensing functionality experimentally verified the found be 4.4×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-4</sup> Hz/fC...

This paper presents design and experimental evaluation of a highly sensitive micro biaxial resonant accelerometer with two-stage microleverage mechanisms. The device incorporates two pairs double-ended tuning fork (DETF) resonators coupled to single proof mass. A high level sensitivity is realized due the mechanisms low cross-axis achieved because decoupling beams. Experimental results demonstrate an average differential 275 Hz/g around frequency 290 kHz 3.4%. For ±45° detection range,...

In this research, a novel biaxial resonant micro accelerometer with single proof mass is presented, which realizes decoupling effect between two orthogonal axes by beam and increases sensitivity microleverage mechanism. This device was fabricated in commercial process of SOIMUMPs. The fixed on rotating structure put vacuum chamber for testing. experimental results demonstrate low level cross-axis differential 71.25 Hz/g around frequency about 267.7 kHz under 37.5 mTorr pressure.

In this paper, a micromechanical electrostatic resonant charge sensor with responsivity enhanced by introducing dual single-stage microleverage mechanisms (microlevers) is presented.The based on the mechanism of detecting frequency shift single-crystal silicon double-ended tuning fork (DETF) element due to axial compression generated additional and transformed microlevers.An analytic model comprising both mechanical electrical subsystems was derived.The system-level simulation carried out...

Single-photon light detection and ranging (LiDAR) is a key technology for depth imaging through complex environments. Despite recent advances, an open challenge the ability to isolate LiDAR signal from other spurious sources including background jamming signals. Here we show that time-resolved coincidence scheme can address these challenges by exploiting spatiotemporal correlations between entangled photon pairs. We demonstrate photon-pair-based distill desired information in presence of...

A micromachined resonant electrostatic charge sensor with enhanced responsivity by introducing dual single-stage micro-leverage mechanisms is presented. The based on the detection of frequency shift a single-crystal silicon double-ended tuning fork (DETF) element due to axial compressive generated additional and transformed micro-levers. An analytic model was derived in detail comprising both mechanical electrical subsystems. quality factor resonator about 4,900 at an operating pressure 40...