A5090037811- Semiconductor materials and devices
- Microfluidic and Bio-sensing Technologies
- Silicon Carbide Semiconductor Technologies
- Nanowire Synthesis and Applications
- 3D IC and TSV technologies
- Advanced MEMS and NEMS Technologies
- Supercapacitor Materials and Fabrication
- Silicon Nanostructures and Photoluminescence
- Electromagnetic Compatibility and Noise Suppression
- Advanced DC-DC Converters
- Microfluidic and Capillary Electrophoresis Applications
- Semiconductor Lasers and Optical Devices
- Mechanical and Optical Resonators
- Copper Interconnects and Reliability
- Microwave Engineering and Waveguides
- Electrocatalysts for Energy Conversion
- Analytical Chemistry and Sensors
- Wireless Power Transfer Systems
- Advanced Surface Polishing Techniques
- Nanofabrication and Lithography Techniques
- Radio Frequency Integrated Circuit Design
- Advanced Sensor and Energy Harvesting Materials
- Micro and Nano Robotics
- Electronic Packaging and Soldering Technologies
- Neuroscience and Neural Engineering
Laboratoire d'Analyse et d'Architecture des Systèmes
2016-2025
Centre National de la Recherche Scientifique
2013-2025
Université de Toulouse
2013-2025
Laboratoire des Technologies de la Microélectronique
2015-2024
Université Toulouse III - Paul Sabatier
2008-2024
Institut National Polytechnique de Toulouse
2014-2023
Roche (France)
2005-2021
Laboratoire Plasma et Conversion d'Energie
2013-2014
Roche (Switzerland)
2012
Flexible intracerebral probes for neural recording and electrical stimulation have been the focus of many research works to achieve better compliance with surrounding tissue while minimizing rejection. Strategies explored find best way insert flexible into brain maintaining their flexibility once positioned. Here, we present a novel versatile scalable batch fabrication approach deliver ultrathin consisting silk-parylene bilayer. The biodegradable silk layer, whose degradation time is...
We investigated the interactions between liquid, gas, and solid phases in capillary filling process of closed-end nanochannels. This paper presents theoretical models without with absorption diffusion gas molecules liquid. Capillary experiments were carried out silicon nanochannels different lengths. The measured characteristics length versus time are compared. results show that consists two stages. first stage resembles an open-end nanochannel. However, a remarkable discrepancy experimental...
Abstract Due to their high‐power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, fabrication remains confined 2D thin‐film microdevices with limited areal energy. In this study, integration all‐solid‐state 3D interdigitated on 4 in. silicon wafers record is demonstrated. The device electrodes are composed a pseudocapacitive hydrated ruthenium dioxide RuO 2 deposited...
Micropipette aspiration (MPA) is one of the gold standards for quantifying biological samples' mechanical properties, which are crucial from cell membrane scale to multicellular tissue. However, relying on manipulation individual home-made glass pipettes, MPA suffers low throughput and no automation. Here, we introduce sliding insert micropipette method, permits parallelization automation, thanks insertion tubular obtained by photolithography, within microfluidic channels. We show its...
<title>Abstract</title> We present a simple and robust process for fabricating III-Nitride (III-N) mechanical resonators on flexible metal substrates. This method combines Van der Waals epitaxy of III-N epilayers with the deposition thick stressor atop layers. During thermal treatment, 30 µm deposited 300 nm AlGaN / 500 GaN layer grown 3 two-dimensional hexagonal-Boron Nitride (2D h-BN) release layer, initiates one-step Self-Lift-Off Transfer (SLOT) process. effectively transfers...
Abstract The monolithic integration of high‐performance magnets into microfabricated devices remains a technological challenge despite the great interest for telecommunications, automotive, biomedical or space applications. Here 50 µm thick sputtered arrays NdFeB micromagnets functional micro‐electro mechanical system (MEMS) in‐plane electromagnetic vibration energy harvester is reported. A combination analytical modeling and numerical simulations guided design magnet along with ad‐hoc...
à la diffusion de documents scientifiques niveau recherche, publiés ou non, émanant des établissements d'enseignement et recherche français étrangers, laboratoires publics privés.
A broadband technique for determining electrical properties of dielectric materials is presented, based on microstrip lines. Relative permittivity and loss tangent are computed from S-parameter measurements analytical equations. The computation either direct by using equations derived Bahl formulas, or iterative Jensen-Hammerstad formulas coupled with the efficient secant algorithm. Thin film transmission lines have been fabricated extraction SU-8 resin. relative constant 2.85 a 0.04 were...
A flexible microfluidic system embedding microelectromagnets has been designed, modeled and fabricated by using a photosensitive resin as structural material. The fabrication process involves the integration of micro-coils in multilayer SU-8 combining standard electroplating dry films lamination. This technique offers numerous advantages terms integration, biocompatibility chemical resistance. Various designs micro-coils, including spiral, square or serpentine wires, have simulated...
The objective of the present work is to investigate experimentally deposition micron-sized particles onto surface a microsieve membrane, which consists in thin screen with patterned circular holes. A dilute suspension spherical, monodisperse, polystyrene flows at an imposed flow rate through frontal filtration mode (i.e., direction perpendicular membrane). particle-to-pore diameter ratio inferior one. particle and Reynolds numbers are both smaller than 0.1 for regimes investigated study....
In this work, we present a novel fabrication process that enables the monolithic integration of lateral porous silicon membranes into single-layer planar microchannels. This technique relies on patterning local electrodes to guide pore formation horizontally within membrane and use silicon-on-insulator substrates spatially localize channel depth. The feasibility our approach is studied by current flow analysis using finite element method supported creating 10 μm long mesoporous 20 deep...
Three-dimensional (3D) electrodes with improved areal energy have become increasingly important for microscale storage at the dawn of Internet Things. At its heart are a plethora microelectronic devices that require embedded harvesters and components to ensure autonomy. In this study, we develop porous metallic microstructures their conformal coating new RuOxNySz material through facile optimized electrodeposition process. The microporous structure nanodendritic network shows high...
DNA-directed assembly of nano-objects as a means to manufacture advanced nanomaterial architectures has been the subject many studies. However, most applications have dealt with noble metals there are fundamental difficulties work other materials. In this work, we propose generic and systematic approach for functionalizing characterizing oxide surfaces single-stranded DNA oligonucleotides. This protocol is applied aluminum copper nanoparticles due their great interest fabrication highly...
We proposed a safe MEMS pyrotechnical igniter made of one micro and three single-use electrothermal switches. One ON–OFF switch is used to arm the initiator. OFF–ON disarm initiator by cutting its electrical connections from power supply. A second definitively removes initiator's ignition capability. Switches are based on mechanisms consist in breaking connection (ON–OFF switching), or soldering locally two (OFF–ON switching). The switching decomposition GAP energetic material requires 500...
Abstract While capillary filling in channels of micrometers scale is experimentally verified to obey Washburn's law well, the speed nanochannels noticeably lower than described by formula. This article reports theoretical and experimental results on open-end closed-end nanochannels. Nanochannels 45 nm 80 depth, 10 μm width, were etched silicon bonded a glass cover. Experiments non-electrolytic liquid carried out. The processes observed recorded. To estimate influence electrokinetics,...
RF microelectromechanical (MEMS) switches are usually limited in term of power handling. Self actuation and electro migration constitute indeed the main failure mechanisms related to medium high power. To overcome these malfunctions, an original MEMS topology based on use two bridge levels is proposed this paper. Both appropriate design technology have been developed order enhance capabilities switches. A handling 8W cold switching has finally reached.
We report the preparation of Bose-Einstein condensates (BECs) by integrating laser cooling with a grating magneto-optical trap (GMOT) and forced evaporation in magnetic on single chip. This new approach allowed us to produce $6 \times 10^4$ atom condensate rubidium-87 atoms beam. Our results represent significant advance robustness reliability cold atom-based inertial sensors, especially for applications demanding field environments.
This paper presents the first results of fabrication and characterization a biological sensor based on two complementary parts. A microfluidic channel along with micromachined stop-band filter are used to detect type fluid which flows beneath electronic circuit. The tridimensional (3D) structure microstrip technology is integrated using SU8 material thus supports use buried channels. Besides being method without contact, this bio-sensor avoids evaporation, contamination, or label fixation....