A pico calorimeter with a highly sensitive sensor for detecting heat from biological cell is developed and evaluated, also the detection of single brown fat has been demonstrated. The measurement principle relies on resonant frequency tracking resonator in temperature variation due to sample; placed vacuum, conducted sample microfluidic channel via guide. This configuration can prevent loss surroundings damping water. resolution fabricated 5.2 pJ. Heat emissions cells are detected as pulsed...

Abstract This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film its novel applications to micro- nano-devices. The AZO is deposited successfully by atomic layer (ALD). 50 nm-thick with high uniformity checked scanning electron microscopy. element composition various aluminum dopant concentration analyzed energy-dispersive X-ray spectroscopy. In addition, a polycrystalline feature confirmed selected area diffraction high-resolution...

A 3D bulk metamaterial (MM) containing amorphous multilayered split-ring resonators is proposed, fabricated, and evaluated. Experimentally, the effective refractive index engineered via MM, with a contrast of 0.118 across frequency span from 0.315 to 0.366 THz changing at slope 2.314 per within this range. Additionally, MM exhibits optical isotropy respect polarization. Moreover, peak transmission dispersion are tailored by adjusting density resonators. Compared reported conventional...

<p dir="ltr">A thermal radiator with smart VO2-based metamaterials is investigated that passively adjusts its radiative properties as a function of temperature. At high temperatures, the proposed device exhibits low absorption at vertical angles but emission angles, facilitating effective heat dissipation even under solar irradiance, while temperatures it acts low-emitting material. It can be applied to used in spacecraft. The property experimentally demonstrated by measuring...

<p dir="ltr">A thermal radiator with smart VO2-based metamaterials is investigated that passively adjusts its radiative properties as a function of temperature. At high temperatures, the proposed device exhibits low absorption at vertical angles but emission angles, facilitating effective heat dissipation even under solar irradiance, while temperatures it acts low-emitting material. It can be applied to used in spacecraft. The property experimentally demonstrated by measuring...

Abstract Piezoresistivity of B- and P-doped epitaxial Si1-xGex (x=10-30%) is investigated to assess its application potential for thin film strain sensors. The gauge factor (GF) calculated based on the change in resistivity externally induced compressive uniaxial along current flow direction. In case B-doped SiGe, decreases under which may be related hole mobility enhancement, while no influence SiGe. A significant increase GF observed by lowering B concentration. At same concentration,...

This review presents two types of cantilever beams employed as highly sensitive temperature sensors. One type is fabricated from composite materials and operated in the deflection mode. The second type, used a sensor presented this review, resonant beam. for fabrication bimaterial beam are silicon or nitride thin metallic films such gold aluminum. When changes, different coefficients thermal expansion metal cause to deflect. Considering models measurement biological cells, heat should be...

A highly sensitive thermometer system for a living cell is proposed, fabricated, and evaluated. The possesses resonant thermal sensor surrounded by vacuum in microfluidic chip. measurement principle relies on frequency tracking of the resonator temperature variations due to heat from sample cell; conducted channel via guide connecting stage. This configuration can reduce loss surroundings damping water. Two types resonators are prepared, i.e., cantilevered double-supported resonator. sizes...

This paper reports the piezoresistive performance of two-dimensional (2D) material vanadium (V)-doped molybdenum disulfide (MoS2) films based on sulfurization sputtered Mo thin films. I–V characteristics indicate that V atom doping indeed decreases resistivity MoS2. Strain sensors V-doped MoS2 resistive elements were fabricated. By using a four-point bending method, gauge factor (GF) 140 under compressive and tensile strain conditions was obtained. The effect with different sputtering also...

We experimentally demonstrate a microelectromechanically reconfigurable ladder-shaped metamaterial (LS-MM) operating in terahertz (THz) range. Ultrasmall cantilever actuators with beam length of 14 μm are employed to independently reshape each unit cell the LS-MM, correspondingly switching transmission response THz waves. The driven LS-MM achieves tuning contrast 60.1% transmittance at 0.78 and 0.9-rad delay phase shift 1.35 through off-to-on reconfiguration. In particular, actuator has high...

In this paper, a centimeter-scale monolayer molybdenum disulfide (MoS2) film deposition method has been developed through simple low-pressure chemical vapor (LPCVD) growth system. The pressure dependence on quality is investigated in LPCVD layer nature, electrical characteristic of the as-grown MoS2 films indicate that high have achieved. addition, hydrofluoric acid treated SiO2/Si substrate used to improve films. Piezoresistive strain sensor based elements fabricated by directly patterning...

In this paper, the metal‐assisted chemical etching (MACE) method is presented along with advantages of using method. Large areas and a combination large narrow patterning are successfully produced by metal meshes for MACE. Moreover, in order to exemplify microfabrication technique, authors demonstrate fabrications different microelectromechanical systems (MEMS) devices; from simple structure (micro‐cantilever) complex (capacitive silicon resonator). Micro‐cantilever beam resonant frequency...

We constructed a tunable Fabry–Perot interferometer (FPI) by controlling the effective refractive index of pitch-variable subwavelength gratings (PV-SWGs) that were incorporated into an FP cavity. The period PV-SWG can be varied to change and shift optical resonant frequency FPI. Compared with conventional methods tune resonance adding fillers or deforming cavity, proposed FPI obtained higher transmission quality factor (Q-factor) for transmittance peak, its shifted simply stretching PV-SWG....

In this study, we propose a terahertz stretchable metamaterial that can measure uniaxial strain. Gold dolmen resonators formed on sheet of polydimethylsiloxane (PDMS) is deformed by strain, and its resonance peak exhibits the gradual decrease in reflectance without frequency shift, which suitable for imaging applications at single frequency. The was designed mechanical electromagnetic simulations fabricated microfabrication including transfer process gold structures from glass substrate to...

In this paper, we developed and fabricated a magnetically driven microtool (MMT) installed it on microfluidic chip for use in the enucleation of oocytes. The tool is much smaller than conventional mechanical micromanipulator used cell manipulation. We succeeded driving MMT two degrees freedom-in <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">X</i> - xmlns:xlink="http://www.w3.org/1999/xlink">Y</i> -directions. works principle noncontact actuation...

In this work, we report a simple and low-cost way to create nanopores that can be employed for various applications in nanofluidics. Nano sized Ag particles the range from 1 20 nm are formed on silicon substrate with de-wetting method. Then an approximate 15 average diameter 200 μm height successfully produced by metal-assisted chemical etching addition, electrically driven ion transport is demonstrated nanofluidic applications. Ion through observed could controlled application of gating...

We numerically and experimentally proposed a reconfigurable THz metamaterial (MM) by employing microelectromechanical cantilevers into ladder-shaped MM (LS-MM). A fixed-free cantilever array with dimpled tip behaved as Ohmic switches to reshape the LS-MM so actively regular transmission response of waves. The was designed be concave dimple improve operational life without sacrificing mechanical resonant frequency (fmr), fmr 635 kHz demonstrated. device achieved 115-GHz change in...

The development of high-sensitive and economical strain sensors is crucial for precise efficient measurement ultra-small in industrial applications. This paper reports a microfabricated sensor based on aluminum nitride (AlN) combined with metal-oxide-semiconductor field effect transistor (MOSFET). A high-quality AlN thin film works as sensing element, which connected electrically to the gate electrode MOSFET amplification piezoelectric response film. pseudo gauge factor (GF) evaluated from...

Thermal detection is an effective means of investigating the thermodynamics, metabolic mechanisms, and functions cells. Here, a sensing device for performing thermal measurements in single cultured cells fabricated, its characteristics are evaluated. Moreover, temperature was demonstrated. The composed vanadium dioxide (VO2) microthermistors on suspended SiO2 membrane with polydimethylsiloxane (PDMS) chamber. We demonstrated sensor surface inside PDMS dimensions sensors were 50 × μm2, almost...

Abstract A sensitive thermal microsensor based on a pn junction diode for heat measurements of biological single cells is developed and evaluated. Using fabricated device, we demonstrated the measurement brown fat cell. The principle sensor relies temperature dependence resistance. This method has capability highly sensitivity by downsizing advantage simple experimental setup using electrical circuits without any special equipment. To achieve cells, necessary to reduce capacity itself. with...

The microfabrication with a magnetostrictive TbxDy(1-x)Fey thin film for magnetic microactuators is developed, and the actuation performances of deposited are evaluated. on metal seed layer by electrodeposition using potentiostat in an aqueous solution. Bi-material cantilever structures Tb0.36Dy0.64Fe1.9 thin-film fabricated microfabrication, evaluated under application field. actuators show large magnetostriction coefficients approximately 1250 ppm at field 11000 Oe.