The propagation of the Lamb-like modes along a silicon-on-insulator (SOI)/AlN thin supported structure was theoretically studied in order to exploit intrinsic zero group velocity (ZGV) features design electroacoustic resonators that don't require metal strip gratings or suspended edges confine acoustic energy.The ZGV resonant conditions SOI/AlN composite plate, i.e. frequencies where mode vanishes while phase remains finite, were investigated frequency range from few hundreds MHz up 1900...

A silicon-nanowire-based Coulter counter has been designed and fabricated for particle/cell enumeration. The silicon nanowire was in a fully complementary metal-oxide-semiconductor (CMOS)-compatible process used as field effect transistor (FET) device. device worked on the principle of potential change detection introduced by passing microparticles/cells through sensing channel. Device uniformity confirmed scanning electron microscopy transmission microscopy. Current-voltage measurement...

The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering decision-making electronics together with all sorts sensors actuators. Mechanical manipulation can be obtained through microactuators, taking advantage magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation,...

A ring-shaped tri-axial force sensor with a 200 µm × area using silicon nanowires (SiNWs) as piezoresistive sensing elements is developed and characterized. The comprises suspended ring structure located at the center of four beams that can be integrated on distal tip guidewire by passing through hollow core sensor. SiNWs length 6 cross section 90 nm are embedded anchor each bridge along 〈1 1 0〉 direction element. Finite element analysis has been used to determine location maximum stress...

The propagation of surface acoustic Love modes along ZnO/glass-based structures was modeled and analysed with the goal designing a sensor able to detect changes in environmental parameters, such as liquid viscosity minute amounts mass supported viscous medium. mode by numerically solving system coupled electro-mechanical field equations Navier-Stokes equations. phase group velocities attenuation wave propagating 30° tilted c-axis ZnO/glass structure contacting non-conductive were calculated...

Surface acoustic wave (SAW) based sensors for applications to gaseous environments have been widely investigated since the last 1970s.More recently, SAW-based focus has shifted towards liquid-phase sensing applications: SAW sensor contacts directly solution be tested and can utilized characterizing physical chemical properties of liquids, as well biochemical applications.The design liquid phase requires selection several parameters, such polarizations (i.e., elliptical, longitudinal shear...

ABSTRACT Finite element analysis is carried out to investigate the characteristics of Rayleigh, Sezawa and Love surface acoustic modes travelling along c-axis tilted ZnO layer on Si (001) half-space. The phase velocity dispersion curves, electromechanical coupling, reflectivity mass loading sensitivity are studied for different electroacoustic coupling configurations tilt angles θ. behavior Rayleigh operating as gas sensor, was simulated under hypothesis that free covered with a thin...

The propagation of the quasi-Lamb modes along a-SiC/ZnO thin composite plates was modeled and analysed with aim to design a sensor able detect changes in parameters liquid environment, such as added mass viscosity changes. by numerically solving system coupled electro-mechanical field equations three media. mode shape, power flow, phase velocity, electroacoustic coupling efficiency (K²) were calculated, specifically addressing enhanced-coupling, microwave frequency sensors for applications...

PMMA/ZnO/glass structure was investigated to enhance Love mode sensor sentivities. The phase velocities and the attenuation of acoustic wave propagating along PMMA/30° tilted c-axis ZnO/glass contacting a viscous non-conductive liquid were calculated for different PMMA (Polymethyl methacrylate) ZnO guiding layer thicknesses, added mass viscosity density. velocity sensitivities also environmental parameters. resulted optimized by adjusting thickness corresponding sensitivity peak. present...

This paper presents the integration process of tactile sensor system using polymer flexible cable for sensorised guide wire application and described fabrication flow polyimide cable, silicon holder assembly processes. Polyimide is used due its biocompatibility suitable mechanical properties bending. Sensorised prototype was assembled dummy ASIC chip.

The propagation of the Lamb modes along a-SiC/ZnO thin supported composite structures was simulated for different ZnO and a-SiC layer thicknesses electrical boundary conditions. phase group velocity, field profile electroacoustic coupling coefficient dispersion curves travelling plate were calculated layers thicknesses. Zero velocity (ZGV) points identified which vanishes while remains finite, at specific thickness values. ZGV resonators (ZGVRs) designed that consist in only one interdigital...

Abstract Higher-order Lamb waves with quasi-zero surface displacement components are reported on (100)-cut GaAs propagating along the <110> direction where total at of plate is less than 10% maximum displacement. The dispersion curves and component profiles show reduction starting when phase velocities higher-order modes crossing shear bulk acoustic wave velocity to value as low 5%. Due concentration energy inside plate, (QZ-PAW) further reduce radiation in contact liquid. experimental...

This paper presents the development of a ring shaped force sensor for sensorized guidewire applications. The comprises suspended structure located at center four beams that can be integrated on distal tip guidewire. SiNWs with length 6 μm and cross section 90 nm × are embedded anchor each silicon bridge as piezoresistive sensing elements. Taking advantage high sensitivity SiNWs, fabricated was capable to detect small displacement in ranges 13.4 10 <sup...

This paper presents the integration of miniaturized MEMS tri-axial tactile sensor with surgical needle for robotic assisted minimally invasive surgery (MIS). In MIS, surgeons rely highly on feedback from tip needle. Sensorized will be able to provide quantitative increase accuracy and reduce risk over-cutting. The sensorized could also integrated actuator system surgery.

The propagation of the Lamb-like modes along an AlN/Si3N4 thin suspended membrane was simulated in order to exploit zero group velocity (ZGV) resonant conditions, i.e. frequencies where mode vanishes while phase remains finite. A ZGV micro electroacoustic resonator employing only one interdigital transducer (IDT) and no reflectors designed that is based on first quasi symmetric qS1 at frequency about 1.63 GHz. device fabricated directly onto commercially available Si3N4 membrane, 200 nm...

Abstract Acoustic wave devices are theoretically investigated in their potential role of technological platform for the development sensors liquid environments. In this study, we studied propagation in-plane polarized Lamb modes, Love Shear Horizontal Plate modes along layered structures, aimed at design acoustic waveguides suitable to trade-off mass sensitivity and low loss. The phase velocity shift attenuation due presence a viscous contacting device surface anchored sensor calculated...

Thin film bulk acoustic resonator (TFBAR) with c-axis tilted AlN finite element modeling was performed using COMSOL Multiphysics simulation software. Depending on the tilt angle, dual mode TFBAR can be obtained that operate in longitudinal and shear mode: former is a thickness-extensional mode, while latter thickness-in plane-shear suitable for liquid sensing applications. The wave displacement, frequency equivalent admittance of TFBARs different angles electrode thicknesses were simulated...

This paper describes the integration of micro-electro-mechanical systems (MEMS) tri-axial force sensor using polyimide-based substrate for sensorised guide wire application. For sensor, piezoresistive silicon nanowires (SiNWs) are embedded into a cross cantilever design with maneuverable stylus to allow detection in all directions, and amplify tactile forces at tip transverse directions. The electrical resistance changes four SiNWs used decode an arbitrary applied onto sensor. Robustness is...

This paper reviews our group's work on implantable MEMS flow sensor for detecting prosthetic vascular graft failure. The core sensing mechanism is by measuring the resistance change of a piezoresistor attached to moving part sensor. Variations blood rate causes pressure or change, which deflects part, such as cantilever beam diaphragm, mechanical deformation further stress whose value varies with its internal stress. By accurate one can deduce variation. Two types are studied: silicon...

This paper presented the design, fabrication, and characterization of force transmitting element for MEMS tri-axial sensor application. The consists two main parts: integrated silicon rod mechanical stopper. advantages design are simplicity fabrication process, ability to detect in all direction protect sensing from excessive force, thus increase robustness devices.