A5071828251- Advancements in Photolithography Techniques
- Plasmonic and Surface Plasmon Research
- Nanofabrication and Lithography Techniques
- Advanced X-ray Imaging Techniques
- Photonic Crystals and Applications
- Medical Imaging Techniques and Applications
- Radiation Detection and Scintillator Technologies
- Advanced Surface Polishing Techniques
- Digital Holography and Microscopy
- Metamaterials and Metasurfaces Applications
- Particle Accelerators and Free-Electron Lasers
- Optical measurement and interference techniques
- Advanced Optical Sensing Technologies
- Orbital Angular Momentum in Optics
- Semiconductor Lasers and Optical Devices
- Photonic and Optical Devices
- Random lasers and scattering media
- Integrated Circuits and Semiconductor Failure Analysis
- Biosensors and Analytical Detection
- Color Science and Applications
- Advanced Electron Microscopy Techniques and Applications
- Image Enhancement Techniques
- Advanced Fluorescence Microscopy Techniques
- Terahertz technology and applications
- Copper Interconnects and Reliability
Shanghai Advanced Research Institute
2019-2024
Chinese Academy of Sciences
2008-2024
Chongqing University
2024
Shanghai Institute of Applied Physics
2008-2024
Shanghai Synchrotron Radiation Facility
2016-2024
A series of molecular glass compounds (SP-BOC, SP-AD, and SP-BU) based on 9,9′-spirobifluorene backbone with different kinds pendant groups (t-butyloxycarbonyl, adamantyl ester, t-butyl ester groups) were synthesized. The thermal analysis the indicated that no apparent transition temperature (Tg) was observed before onset decomposition temperatures (Td) up to 150 °C. good resistance suggests they can satisfy lithography process are candidates for photoresist materials. They used as positive...
A series of t-butyloxycarbonyl (t-Boc) protected tetraphenylsilane derivatives (TPSi-Boc x , = 60, 70, 85, 100%) were synthesized and used as resist materials to investigate the effect t-Boc protecting ratio on advanced lithography. The physical properties such solubility, film-forming ability, thermal stability TPSi-Boc examined assess suitability for application candidates positive-tone molecular glass materials. effects had been studied in detail by electron beam results suggest that with...
Abstract This paper introduces the recent progress in methodologies and their related applications based on soft x-ray interference lithography beamline Shanghai synchrotron radiation facility. Dual-beam, multibeam Talbot have been adopted as basic methods beamline. To improve experimental performance, a precise real-time vibration evaluation system has established; stability greatly improved. In order to meet demands for higher resolution practical application, novel developed, such...
A band-reject filter working in a near-infrared regime employing bilayer Ag metasurface was demonstrated numerically and experimentally. This exhibited broad rejection band (more than 500 nm), simple structure (including an ultrathin metal film, dielectric layer, substrate), high tunability the spectral region, superior to previously reported filters with features. Simulations of optical reflection spectra under different conditions were carried out revealed that filtering behavior strongly...
Metasurface attracts much attention but lacks the modulation ability along beam propagation direction, which confines its to control wavelength and polarization of light. We propose a new concept metainterface by embedding two-dimensional metamaterial in layered structure with vertical ability. It can hugely improve light power generate excellent characteristics while keeping simple fabrication processes. A high-performance spectro-polarimetric filter, is based on interface composed...
The single-exposure patterned area is about several 102 × μm2 which mainly decided by the mask in multi-beam X-ray interference lithography (XIL). exposure difficult to stitch a larger one because surrounded 0th diffraction areas. To block beams precisely and effectively, new large technology developed Shanghai Synchrotron Radiation Facility applying an order-sorting aperture with situ monitoring scheme XIL system. could be stitched readily up square centimeters even bigger this technology.
Ultrafast x-ray diffraction imaging provides an opportunity to realize nanoimaging of biomolecules before radiation damage, while the image resolution is still restricted by photon flux. Fourier-transform ghost based on temporal intensity correlation can achieve diffraction-limited imaging. However, a large number samplings are inevitable, which makes it almost impossible be implemented in ultrafast Here, we propose single-exposure (SFGI) approach. The Fourier information unknown sample...
Spectropolarimetry detection provides multi-dimensional accurate information with broad applications from biomedicine to remote sensing. Existing methods for simultaneously obtaining spectra and polarizations are either large complex systems or miniaturized devices too low spectral resolution poor polarization selectivity, which inherently generate cross-talk of substantial information. Here, we propose a compact single-chip integrated high-performance mid-infrared spectropolarimetry filter...
A novel hybrid method that combines the laser-focused atomic deposition (LFAD) and extreme ultraviolet (EUV) interference lithography has been introduced. The Cr grating manufactured by LFAD advantages of excellent uniformity, low line edge roughness its pitch value determined directly nature constants (i.e. self-traceable). To further enhance density grating, EUV with 13.4 nm wavelength was employed, which replicated master onto a Si wafer reduced to half. In order verify performance...
Surfaces with nanostructure patterning are broadly encountered in nature, and they play a significant role regulating various phenomena such as phase transition at the liquid/solid interface. Here, we designed two kinds of template substrates periodic patterns [i.e., nanotrench (NT) nanopore (NP)]. Surface nanodroplets produced on these surfaces were characterized to acquire their morphology wetting properties. We show that could effectively regulate shape, contact radius, nucleate site...
Variable-included-angle varied-line-spacing plane-grating monochromators (VIA-VPGM) have been applied to many beamlines because of the self-focusing and aberration-correction function grating. Unfortunately, optimize variable-line-spacing coefficient grating, fixed-focus constant ( C ff ) has be fixed first in VIA-VPGM. In this way, some advantages these are lost, such as flexibility choosing a different energy-resolving power by varying . work, variable optimization method is introduced for...
Metasurfaces with complex periodic nanoarrays have attracted a large amount of attention over the past decades due to their pronounced plasmonic and photonic properties. Though various metasurface properties been theoretically experimentally investigated, realization practical applications remains big challenge very limited large-area nanostructure fabrication. In this paper, we demonstrate parallel direct writing achromatic Talbot lithography (DW-ATL) technique for arbitrary sub-micron...
We design and fabricate a substrate based on three-dimensional array–film hybrid structure used for surface enhanced Raman scattering (SERS). This exhibits improvements both in sensitivity homogeneity the signals. As result, increases signal of Rhodamine 6G by 12.3 times under same measurement conditions, compared with conventional gold array sitting directly silica wafer. The SERS can be easily tuned changing thickness SiO2 separation. Meanwhile, relative standard deviations are achieved to...
X-ray free-electron lasers (XFELs) play an increasingly important role in addressing the new scientific challenges relating to their high brightness, coherence and femtosecond time structure. As a result of pulse-by-pulse fluctuations, pulses XFEL beam may demonstrate subtle differences intensity, energy spectrum, coherence, wavefront, etc ., thus on-line monitoring diagnosis single pulse are required for many experiments. Here method is presented, based on grating splitter bending-crystal...
We experimentally demonstrate a tunable narrow-linewidth distributed feedback (DFB) laser diode based on the artificially enhanced Rayleigh backscattering in piece of high numerical aperture single-mode fiber. Taking advantage femtosecond pulses induced randomly refractive index modulation core fiber with length 15 m and 0.35, is by 60 dB. By importing external into lasing cavity DFB diode, frequency noise suppressed from 1.2 × 10 5 Hz 2 /Hz to 5.6 /Hz, corresponding suppression ratio 43.31...
The limited pattern area of periodic nanostructures limits the development practical devices. This study introduces an X-ray interference lithography (XIL) stitching technique to fabricate a large-area (1.5 cm × 1.5 cm) two-dimensional photonic crystal (PhC) on YAG: Ce scintillator, which functions as encoder in high numerical aperture optical encoding imaging system effectively capture high-frequency information. An experiment revealed substantial 7.64 dB improvement signal-to-noise ratio...
Structured beams carrying orbital angular momentum (OAM) provide powerful capabilities for applications in optical tweezers, super-resolution imaging, quantum optics, and ad-vanced microparticle manipulation. However, it is challenging generate control the OAM at extreme ultraviolet (EUV) region due to lack of suitable wave front shaping optics arise from being limited strong absorption most materials. Here, we use a modified Fermat-spiral photon-sieve splitter simultaneously two focused...