Abstract A comprehensive understanding of the combined effects surface roughness and wettability on dynamics trapping process is lacking. This can be primarily attributed to contradictory experimental numerical results regarding impact capillary efficiency. The discrepancy presumably caused by inner pore‐solid interface . Herein, we present a comparative μ ‐CT study static fluid‐fluid pattern in porous media with smooth (glass beads) rough surfaces (natural sands). For first time, global...

Abstract The combined effects of gravitational forces and wettability on displacement trapping have not previously been investigated experimentally in realistic 2D porous media. Here we report the first use representative micromodels that accurately reproduce characteristic geometric, morphological, topological properties 3D sand packs. We these to compare dependence front morphology processes using selected fluid pairs at capillary numbers between 10 −6 −5 . contact angles studied ranged...

Abstract Understanding how different flow patterns emerge at various macro‐ and pore scale heterogeneity, wettability surface roughness is remains a long standing scientific challenge. Such understanding allows to predict the amount of trapped fluid left behind, crucial importance applications ranging from microfluidics fuel cells subsurface storage carbon hydrogen. We examine interplay pore‐scale heterogeneity including both angularity roughness, by combination micro‐CT imaging 3D grain...

The influence of mechanical stress on field effect transistors is investigated using a pressure‐deflected membrane for generation various stresses. It consists silicon and transistors, which are designed manufactured 1.0 μm‐XC10 technology from X‐Fab. transducers sensing placed the edges with maximum stress. Furthermore, position optimized by FEM simulations (Ansys). Different variances impact their electrical properties investigated. Transistors different parameters such as channel lengths,...

In this study, we present a novel approach combining nano-scale imprint lithography (NIL) and reactive ion etching (RIE) to fabricate high-quality surface relief gratings (SRGs). This study provides valuable insights into the challenges optimizations in fabricating SRGs from TiO₂ layers using combination of NIL RIE. The work was performed with SCHOTT RealView® substrates coated 100 nm layer mask pattern widths 200 pitch 400 nm. were processed SmartNIL® method prepare mask....

In this study, a method for depositing and patterning the thermosensitive polymer poly(N-isopropylacrylamide) on SiO2 surfaces is presented potential use in nano-sized microfluidic channels. Two approaches based nanolithographic processes are shown purpose. both cases, self-assembling monolayer consisting of (3-aminopropyl)-dimethylethoxysilane was bound to hydroxyl group substrate surface subsequently functionalized with polymerization initiator α-bromoisobutyryl bromide. first approach...

Abstract Network-based biocomputation (NBC) is an alternative, parallel computation approach that can potentially solve technologically important, combinatorial problems with much lower energy consumption than electronic processors. In NBC, a problem encoded into physical, nanofabricated network. The solved by biological agents (such as cytoskeletal filaments driven molecular motors) explore all possible pathways through the network in massively and highly energy-efficient manner. Whereas...

The 3‐satisfiability Problem (3‐SAT) is a demanding combinatorial problem that of central importance among the nondeterministic polynomial (NP) complete problems, with applications in circuit design, artificial intelligence, and logistics. Even optimized algorithms, solution space needs to be explored grows exponentially increasing size 3‐SAT instances. Thus, large instances require excessive amounts energy solve serial electronic computers. Network‐based biocomputation (NBC) parallel...

Improved hearing restoration by cochlear implants (CI) is expected optical (oCI) exciting optogenetically modified spiral ganglion neurons (SGNs) via an pulse generated outside the cochlea. The guided to SGNs inside cochlea flexible polymer-based waveguide probes. fabrication of these probes realized using 6" wafer-level micromachining processes, including lithography processes such as spin-coating cladding layers and a layer in between etch for structuring layer. Further adhesion metal...

Network-based biocomputation (NBC) relies on accurate guiding of biological agents through nanofabricated channels produced by lithographic patterning techniques. Here, we report the large-scale, wafer-level fabrication optimized microfluidic channel networks (NBC networks) using electron-beam lithography as central method. To confirm functionality these NBC networks, solve an instance a classical non-deterministic-polynomial-time complete ("NP-complete") problem, subset-sum problem. The...

Herein, an Intra-level Mix & Match approach (ILM&M) was investigated to combine electron beam lithography (EBL) and i-line stepper on the same resist layer. This technique allows combination of advantages from both technologies. EBL enables manufacturing small sub 100 nm structures but has disadvantage low writing speed especially for larger structures. The mask- or reticle-based are used exposure features with reduced time. Here negative tone ma-N 1402 (from Micro Resist Technology GmbH),...

Abstract Evaporation —a key process for water exchange between soil and atmosphere—is controlled by internal fluxes surface vapor fluxes. Recent studies demonstrated that the dynamics of flow in corners determine time behavior evaporation rate. The flux porous media is often described capillary assuming complete wetting . Particularly, crucial influence partial , is, nonlinear contact angle dependency has been neglected so far. focus paper to demonstrate SiO 2 ‐surfaces can exhibit angles...

Information processing by traditional, serial electronic processors consumes an ever-increasing part of the global electricity supply. An alternative, highly energy efficient, parallel computing paradigm is network-based biocomputation (NBC). In NBC a given combinatorial problem encoded into nanofabricated, modular network. Parallel exploration network very large number independent molecular-motor-propelled protein filaments solves problem. Here we demonstrate significant scale-up this...

Abstract Energy dissipation through physical downscaling towards more complex types of memory and logic devices, loss ultrapure water consumption large amounts (toxic) chemicals for wafer cleaning processes, as well high thermal budget solid-state synthesis thin film growth standard semiconductors including the use rare earth elements – all this poses great challenges semiconductor materials science technology. Therefore, research development alternative methods micro- nanofabrication...

Achieving high-quality interconnect interfaces for fine pitch integration is crucial in today's advanced electronic systems. Among various options, hybrid bonding stands out as a superior choice due to its ability accommodate high input/output (I/O) count, enabling high-density memory integration, increased power delivery, and improved signal speed. To ensure the utmost quality bonding, embedding Cu interconnects within dielectric layer has proven effective. Furthermore, surface...

In this paper the characterization of mr-EBL 6000.5, which is an epoxy resin based chemically amplified negative tone resist from micro technology (Germany, Berlin) for Intra-Level Mix & Match (ILM&M) approach presented. The ILM&M combined at least two exposure technologies on same layer showing advantage to resolve patterns different dimensions with less process steps and short processing time. Since 6000.5 capable being sensitive both electron- UV-radiation, parameters i-line stepper...

The high energy consumption of electronic data processors, together with physical challenges limiting their further improvement, has triggered intensive interest in alternative computation paradigms. Here we focus on network-based biocomputation (NBC), a massively parallel approach that benefits from the efficiency biological agents, such as molecular motors or bacteria, and availability large numbers. We analyse define fundamental requirements need to be fulfilled scale up NBC computers...

Technologies for the 3D integration are described within this paper with respect to devices that have retain a specific minimum wafer thickness handling purposes (CMOS) and integrity of mechanical elements (MEMS). This implies <i>Through-Silicon Vias </i>(TSVs) large dimensions high aspect ratios (HAR). Moreover, as main objective, aspired TSV technology had be universal scalable designated utilization in MEMS/CMOS foundry. Two approaches investigated discussed, which TSVs were fabricated...

An adhesive bonding technique for wafer-level encapsulation of high aspect ratio microstructures (HARMS) is presented. The material spin coated on a cap wafer and structured prior to bonding. Thus sealed cavities variable height are created in the layer. SU-8 negative photoresist used as combination with miscellaneous surface materials: silicon, silicon dioxide aluminum. influences process parameters - pressure, temperature time well layer properties bond strength homogeneity have been...

This paper reports on a new method for thin film encapsulation of microelectromechanical systems (MEMS) using plasma enhanced chemical vapor deposited (PECVD) fluorocarbon polymer as sacrificial material and stress optimized SiO/SiN capping layer. technique is applicable wide range MEMS technologies - high aspect ratio well surface microstructures it saves die area enables standard packaging processes such dicing pick place. Beside the fabrication technology, this presents results finite...