A5091502159- Semiconductor materials and devices
- Plasma Diagnostics and Applications
- Diamond and Carbon-based Materials Research
- Ion-surface interactions and analysis
- Polymer Surface Interaction Studies
- Organic Light-Emitting Diodes Research
- Microfluidic and Bio-sensing Technologies
- Adhesion, Friction, and Surface Interactions
- Acoustic Wave Resonator Technologies
- Neuroscience and Neural Engineering
- Aluminum Alloy Microstructure Properties
- Electronic and Structural Properties of Oxides
- Nanofabrication and Lithography Techniques
- Molecular Junctions and Nanostructures
- Mass Spectrometry Techniques and Applications
- Conducting polymers and applications
- Bauxite Residue and Utilization
- Silk-based biomaterials and applications
- Metallurgical Processes and Thermodynamics
- Organic Electronics and Photovoltaics
- Metal and Thin Film Mechanics
- Advanced Memory and Neural Computing
- Advancements in Photolithography Techniques
- Electronic Packaging and Soldering Technologies
- Copper Interconnects and Reliability
University of Maryland, College Park
2018-2022
Carl Zeiss (Germany)
2022
IBM Research - Thomas J. Watson Research Center
2020
Research Center for Applied Science, Academia Sinica
2013-2017
Academia Sinica
2016
Case Western Reserve University
2011
National Central University
2009
National Tsing Hua University
2006-2008
Cell adhesion is central to many cell behaviors including survival, differentiation, and motility. With the recent development of biomaterials medical instrumentation, on artificial biosurfaces have gained attention from research community. Self-assembled monolayers (SAMs) are known for their excellent ability modify surfaces. To achieve more precise control surface properties, mixed 6-amino-1-hexanethiol 6-mercaptohexanonic acid were deposited a gold substrate, in physiological environment,...
Extracellular matrix (ECM) proteins, such as fibronectin, laminin, and collagen IV, play important roles in many cellular behaviors, including cell adhesion spreading. Understanding their adsorption behavior on surfaces with different natures is helpful for studying the responses to environments. By tailoring chemical composition binary acidic (anionic) basic (cationic) functionalized self-assembled monolayer (SAM)-modified gold substrates, variable surface potentials can be generated. To...
The authors demonstrate that complex hydrofluorocarbon (HFC) precursors offer significant advantages relative to gas mixtures of comparable elemental ratios for plasma-based selective atomic layer etching (ALE). This work compares a fluorocarbon precursor and H2 with an HFC precursor, i.e., octafluorocyclobutane (C4F8) 3,3,3-trifluoropropene (C3H3F3), SiO2 ALE Si3N4 or Si. For continuous plasma etching, process mixtures, e.g., C4F8/H2, have been employed enable highly material removal based...
Cell adhesion is crucial to cell behaviors including survival, growth, and differentiation. In recent years, quartz crystal microbalance with dissipation monitoring (QCM-D) has exhibited advantages in examining real-time viscoelastic changes of surface interactions. Self-assembled monolayers (SAMs) are known for their convenience versatility modifying surfaces. A series ζ-potentials can be obtained by introducing two functional groups opposite charge gold surfaces, namely,...
The early work of John Coburn and Harold Winters revealed a synergistic effect in ion-enhanced Si etching by the concurrent irradiation Ar+ XeF2. This finding provided an important foundation for development plasma dry processes. experimental results also found effects that are useful atomic layer (ALE) processes characterized self-limited etch rate. ALE approaches widely established can be utilized either directional or isotropic employing proper surface modification product removal steps....
The Ar<sub>2500</sub><sup>+</sup> and O<sub>2</sub><sup>+</sup> cosputter in ToF-SIMS depth profiles retained >95% molecular ion intensity the steady-state.
Cell adhesion plays a key role in biomaterial development. Self-assembled monolayers (SAMs) provide convenient and versatile means of modifying surface properties to study how environmental cues affect the cell process. Serial ζ-potential surfaces can be realized by introducing various ratios oppositely charged functional groups on gold surface. A quartz crystal microbalance with dissipation monitoring (QCM-D) has advantages for examining real-time viscoelastic changes surfaces. This...
In the past decade, C60-based ion gun has been widely utilized in secondary mass spectrometry (SIMS) analysis of organic and biological materials because molecular secondary-ions high masses could be generated by cluster-ion bombardment. This technique furthers development SIMS bioanalysis eliminating need for either heteroatom or isotope labeling. However, intensity high-mass parent ions was usually low limited sensitivity analysis, thus requiring an enhancement these to widen application...
Electron-based surface activation of surfaces functionalized by remote plasma appears like a flexible and novel approach to atomic scale etching deposition. Relative plasma-based dry that uses ion bombardment substrate achieve controlled material removal, electron beam-induced (EBIE) is expected reduce damage, including atom displacement, roughness, undesired removal. One the issues with EBIE limited number chemical precursors can be used functionalize surfaces. In this work, we demonstrate...
Electron-stimulated etching of surfaces functionalized by remote plasma is a flexible and novel approach for material removal. In comparison with dry etching, which uses the ion-neutral synergistic effect to control electron beam-induced (EBIE) an electron-neutral effect. This appears promising reduction plasma-induced damage (PID), including atomic displacement lateral straggling, along potential greater resolution. One challenge EBIE limited selection chemical precursor molecules that can...
Extreme ultraviolet (EUV) lithography has emerged as the next generational step in advancing manufacturing of increasingly complex semiconductor devices. The commercial viability this new lithographic technique requires compatible photoresist (PR) materials that satisfy both and etch requirements good feature resolution, chemical sensitivity, a low line edge roughness, critical dimension uniformity. Achieving decreased pitches modern processing nodes via EUV places limit on available...
A phenomenon that can result in electromigration suppression solder bumps on Cu pads is reported. Under certain current stressing conditions, Ag migrates against the electron flow and forms a compound layer at cathode Sn5Ag/Cu interface. This implies it electrostatic force rather than typical wind dominant acting solute atoms Sn matrix. The formed joint interface could effectively retard electromigration-induced consumption bump pad.