A5046428990- Advanced X-ray Imaging Techniques
- Advanced Measurement and Metrology Techniques
- Optical measurement and interference techniques
- X-ray Spectroscopy and Fluorescence Analysis
- Advanced Surface Polishing Techniques
- Adaptive optics and wavefront sensing
- Advancements in Photolithography Techniques
- Laser-Plasma Interactions and Diagnostics
- Optical Systems and Laser Technology
- Advanced Electron Microscopy Techniques and Applications
- Surface Roughness and Optical Measurements
- Electron and X-Ray Spectroscopy Techniques
- Optical Coatings and Gratings
- Particle Accelerators and Free-Electron Lasers
- Crystallography and Radiation Phenomena
- GaN-based semiconductor devices and materials
- Laser Material Processing Techniques
- Digital Holography and Microscopy
- Advanced X-ray and CT Imaging
- Photocathodes and Microchannel Plates
- Diamond and Carbon-based Materials Research
- Advanced machining processes and optimization
- Integrated Circuits and Semiconductor Failure Analysis
- Image Processing Techniques and Applications
- Nuclear Physics and Applications
Brookhaven National Laboratory
2015-2024
National Synchrotron Light Source II
2017-2023
RIKEN BNL Research Center
2022
Stanford Synchrotron Radiation Lightsource
2021
Synchrotron soleil
2005-2017
Imagine Optic (France)
2007
École Nationale Supérieure de Techniques Avancées
2003-2006
Laboratoire d'Optique Appliquée
2006
École Polytechnique
2006
Université Paris-Sud
1994-2003
In a previous paper, the University of Arizona (UA) has developed measurement technique called: Software Configurable Optical Test System (SCOTS) based on principle reflection deflectometry. this we present results very efficient optical metrology method applied to X-ray mirrors. We used measure surface slope errors with precision and accuracy better than 100 nrad (rms) ~200 (rms), respectively, lateral resolution few mm or less. calibration systems, discuss their address in measuring...
In this work, a model based method is applied to phase measuring deflectometry, named modal deflectometry. The height and slopes of the surface under test are represented by mathematical models updated optimizing coefficients minimize discrepancy between reprojection in ray tracing actual measurement. pose screen relative camera pre-calibrated further optimized together with shape test. Simulations experiments conducted demonstrate feasibility proposed approach.
Abstract Optics with high-precision height and slope are increasingly desired in numerous industrial fields. For instance, Kirkpatrick–Baez (KB) mirrors play an important role synchrotron X-ray applications. A KB system is composed of two aspherical, grazing-incidence used to focus beam. The fabrication challenging due the aspherical departure mirror surfaces from base geometries high-quality requirements for residuals. In this paper, we present process manufacturing elliptical cylinder...
The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment test geometry and calibration inherent system error improve accuracy SCOTS a level where it competes with interferometry. We report measurement an off-axis superpolished elliptical x-ray mirror that achieves <1 nm root-mean-square low-order term included.
There are wide applications for zonal reconstruction methods in slope-based metrology due to its good capability of reconstructing the local details on surface profile. It was noticed literature that large errors occur when using designed rectangular geometry process slopes a quadrilateral geometry, which is more general with phase measuring deflectometry. In this work, we present new idea geometry. Instead employing intermediate set up height-slope equations, consider height increment as...
Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence flat and spherical mirrors. Our process contains three key aspects. First, to minimize misalignment coordinate systems between metrology hardware, mirror holder integrate both sample beam removal function (BRF) mirror. way,...
Abstract With the rapid evolution of synchrotron X-ray sources, demand for high-precision mirrors has greatly increased. Single nanometer profile error is required to keep imaging capability at diffraction limit. Ion Beam Figuring (IBF), as a highly deterministic surfacing technique, been used ultra-precision finishing mirrors. One crucial step that guides IBF process dwell time calculation. A valid solution should be non-negative and duplicate shape desired removal map. Another important...
Two new macromolecular crystallography (MX) beamlines at the National Synchrotron Light Source II, FMX and AMX, opened for general user operation in February 2017 [Schneider et al. (2013). J. Phys. Conf. Ser. 425 , 012003; Fuchs (2014). 493 012021; (2016). AIP Proc. SRI2015 1741 030006]. FMX, micro-focusing Frontier MX beamline sector 17-ID-2 NSLS-II, covers a 5–30 keV photon energy range delivers flux of 4.0 × 10 12 photons s −1 1 Å into µm 1.5 to (V H) variable focus, expected reach 5...
Computer-Controlled Optical Surfacing (CCOS) has been greatly developed and widely used for precision optical fabrication in the past three decades. It relies on robust dwell time solutions to determine how long polishing tools must at certain points over surfaces achieve expected forms. However, as calculations are modeled ill-posed deconvolution, it is always non-trivial reach a reliable solution that 1) non-negative, since CCOS systems not capable of adding materials, 2) minimizes...
We present a 2D Slope measuring System based on Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed high-accuracy automated extremely quality components needed synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error better than 50 nrad rms.
A transport-of-intensity equation (TIE)-based phase retrieval method is proposed with putting an arbitrarily shaped aperture into the optical wavefield. In this aperture, TIE can be solved under nonuniform illuminations and even nonhomogeneous boundary conditions by iterative discrete cosine transforms a compensation mechanism. Simulation arbitrary phase, shape, intensity distribution verifies effective high accuracy of method. Experiment also carried out to check feasibility in real...
This article describes the development and testing of a novel, water-cooled, active optic mirror system (called "REAL: Resistive Element Adjustable Length") that combines cooling with applied auxiliary heating, tailored to spatial distribution thermal load generated by incident beam. technique is theoretically capable sub-nanometer surface figure error control even at high power density. Tests conducted in an optical metrology laboratory synchrotron X-ray beamlines showed ability maintain...
Precision optics have been widely required in many advanced technological applications. X-ray mirrors, as an example, serve the key optical components at synchrotron radiation and free electron laser facilities. They are rectangular silicon or glass substrates where a Clear Aperture (CA) needs to be polished sub-nanometer Root Mean Squared (RMS) keep imaging capability of incoming wavefront diffraction limit. The convolutional polishing model requires CA extended with extra data, from which...
The highly automated macromolecular crystallography beamline AMX/17-ID-1 is an undulator-based high-intensity (>5 × 10 12 photons s −1 ), micro-focus (7 µm 5 µm), low-divergence (1 mrad 0.35 mrad) energy-tunable (5–18 keV) at the NSLS-II, Brookhaven National Laboratory, Upton, NY, USA. It one of three life science beamlines constructed by NIH under ABBIX project and it shares sector 17-ID with FMX beamline, frontier beamline. AMX saw first light in March 2016 started general user...
Partially-coherent wavefront propagation calculations have proven to be feasible and very beneficial in the design of beamlines for 3rd 4th generation Synchrotron Radiation (SR) sources. These types use framework classical electrodynamics description, on same accuracy level, emission by relativistic electrons moving magnetic fields accelerators, emitted radiation wavefronts through beamline optical elements. This enables accurate prediction performance characteristics exploiting high SR...
We present in this Letter a type of quadriwave lateral shearing interferometer for x-ray phase imaging. This device is based on chessboard, and we take advantage the large spectrum source to produce interferograms with propagation-invariant contrast. Such grating has been created hard interferometry experimentally tested synchrotron beamline at Soleil.