A5007077872- Advanced MEMS and NEMS Technologies
- Gas Sensing Nanomaterials and Sensors
- Microfluidic and Bio-sensing Technologies
- Characterization and Applications of Magnetic Nanoparticles
- Mechanical and Optical Resonators
- Transition Metal Oxide Nanomaterials
- 3D Printing in Biomedical Research
- Superconducting and THz Device Technology
- Advanced Chemical Sensor Technologies
- Analytical Chemistry and Sensors
- Nanofabrication and Lithography Techniques
- Microfluidic and Capillary Electrophoresis Applications
- Thin-Film Transistor Technologies
- Advanced Thermoelectric Materials and Devices
- Neuroscience and Neural Engineering
- Nanowire Synthesis and Applications
- Sensor Technology and Measurement Systems
- Non-Destructive Testing Techniques
- Thermal Radiation and Cooling Technologies
- Electrochemical sensors and biosensors
- Innovative Microfluidic and Catalytic Techniques Innovation
- Advanced Sensor Technologies Research
- Advanced Surface Polishing Techniques
- Additive Manufacturing and 3D Printing Technologies
- Electrowetting and Microfluidic Technologies
École Nationale Supérieure d'Ingénieurs de Caen
2007-2023
GREYC
2012-2023
Centre National de la Recherche Scientifique
2005-2023
Laboratoire de Physique Corpusculaire de Caen
2022
Laboratory for Integrated Micro-Mechatronic Systems
2003-2018
Université de Caen Normandie
2008-2018
The University of Tokyo
2003-2018
Tokyo University of Science
2017-2018
Normandie Université
2013-2017
École Normale Supérieure - PSL
2014
We have designed and fabricated a microfluidic system made of glass polydimethylsiloxane. A micro-magnetometer has been integrated to the system. This sensor is giant magneto-impedance wire known very high magnetic sensitivity at room temperature. liquid-liquid segmented multiphase flow was generated in channel using Y-shaped inlet junction. The dispersed phase plugs contained superparamagnetic iron oxide (20 nm) nanoparticles molar concentration 230 mmol/l. shown both theoretically...
This paper presents the detection of magnetic nanoparticles flowing into a microchannel using giant impedance (GMI) microwire sensor made up CoFeSiBNb alloy (40 μm diameter and 1 cm long wire). Detection tests were performed UltraSmall Particles Iron Oxyde (USPIO) with 20 nm. volume 180 nl concentration 18 mmol (Fe)/l flow rate 260 nl/s was performed. Such type measurement can find application in biomedical clinical diagnosis for vivo noninvasive detection.
Since the 2000s, several countries have established micro- and nanofabrication platforms for research education community as national projects. By combining such with VLSI multichip foundry services, various integrated devices, referred to "CMOS-MEMS", can be realized without constructing an entire cleanroom. In this paper, we summarize MEMS-last postprocess schemes CMOS devices on a bulk silicon wafer well silicon-on-insulator (SOI) using open-access cleanroom of Nanotechnology Platform...
Droplet microfluidics has become a powerful tool in life sciences, underlying digital assays, single-cell sequencing or directed evolution, and it is making foray physical sciences as well. Imaging incubation of droplets are crucial, yet they encumbered by the poor optical, thermal mechanical properties PDMS, material commonly used labs. Here we show that Si an ideal for droplet chambers. chambers pack crystalline immobile monolayer, immune to evaporation sagging, boost number collected...
niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français étrangers, laboratoires publics privés.
This paper deals with a magnetic imaging method of nanoparticles (MNPs). A complete analytical model is developed considering the main parameters system. Such modeling induction generated in space by MNPs allows to describe detection system performance and consider spatial reconstruction issue. In particular, for given set (sampling step, liftoff, noise sensor), ultimate resolution 2-D can be derived. We discuss key compare experimental data obtained from scanning measurement.
A novel polymer microarray fabrication technique is presented and applied to the realization of a biochip for highly parallelized cell transfection. The proposed microfabrication derived from macroscale rapid prototyping called vacuum casting. It was optimized reduce production cost, in order produce small series (100–10 000 chip series) chips meet demand today's market cellulomics. Microfabrication technologies are combined shape master part, which can thus involve microsized features....
A new electrical substitution method for resistive bolometers is proposed to operate them in a closed-loop configuration. This was implemented and evaluated with bolometer based on metallic layers over 120 µm thick glass membrane. Based an (ES) directly at the place of sensing element, allows space savings simplification technological manufacturing while maintaining time response improvement linked operation. Compared previously available ES solution, this applicable all bolometers. Time...
Liquid cells are hermetically sealed capsules that make it possible to image through liquids at the nanoscale using Transmission Electron Microscopes (TEM).Liquid can be passive vessels or integrate electrodes up now for electrodeposition experiments.Temperature is a key parameter chemical kinetics of processes.This paper describes temperature controlled liquid cell in-situ TEM studies.The integrates resistive element both heating and sensing temperature.A capacitively coupled heat feedback...
In this paper a new analog behavioral model of negative temperature coefficient thermoresistive sensor developed using SPICE for hot-wire Wheatstone-Bridge Constant Temperature Anemometer is proposed. The was capacitor and voltage current dependent sources. This suitable transient steady-state time domain analysis. Sensor's behavior detailed an example employment in architecture presented. validation made through simulation, results which are presented discussed.
In this paper, digital implementation is proposed for the capacitively coupled electrical substitution resistive bolometers. The a closed-loop configuration that allows operation of bolometer without any change in structure sensor itself. linearizes system composed and electronics substitution. Hence, better optimization control can be achieved. Besides, use set-up experiments are made easier with implementation. performance was evaluated optical radiation power stimulation on glass membrane.
This paper presents a mathematical model of the detection magnetic nanoparticles (MNPs) flowing into microchannel. To validate model, experimental measurements were performed using ferrofluid and giant magneto impedance microwire made up CoFeSiBNb alloy as sensor. The good agreement between theory measurement implies possibility numerical simulation to analyze system performance for MNPs detection. In addition, calculation was performed, which evaluates optimal signal-to-noise ratio function...
In this work, the vacuum-casting process is pushed to its dimensional limits thanks microfabricated original parts. The successful replication of those parts with a slightly adapted demonstrates that technique suitable for biomicrosystem manufacturing and development.
Abstract Several original point charge like electric field sources and a new tri-axial capacitive based sensor have been designed to be associated together build instrument able characterize the electrical properties of environment. The paper presents two fundamental features target imaging instrument: characterization constituent parts system validation low-level data processing functions. are composed several conductive spheres with conical support so that they can assimilated charges....
A fabrication method for making accurate double-height micromolds is presented. Fine features of the micromold are transferred to a three-dimensional poly-dimethylsiloxane (PDMS) microfluidic membrane. The accuracy within 1.55% and maximum aspect ratio 7. In this work, first layer made directly on silicon wafers by inductively coupled plasma reactive ion etching (ICP-RIE). second added photolithography SU-8 negative photoresist top layer. This allows having wall dimensions as small 3 µm that...
We have fabricated a microfluidic microsystem integrating Giant Magneto-Impedance wire sensor that successfully detected the passage of magnetic nanoparticules in liquid medium. microwire sensors consisted CoFeSiBNb alloy, 40 μm diameter and 1 cm long wires. By magnetizing nanoparticles perpendicularly to sensitive axis sensor, we observed magneto-impedance signal variations induced by dipole field from nanoparticles. A peak detector was used measure voltage due variations. The subsequently...
The ability to culture cells on microchips, containing arrays of micro-chambers, is becoming an important diagnostic tool the biomedical researcher. In this work different neural cell types are cultured in microfluidic made from glass and PDMS substrates.. using photolithographically patterned two-layer SU-8 mold transferred PDMS. This allows creation interconnected microchambers, which permit physically isolated form axons preferential directions. culturing several was performed PC-12, P19...
Since 2005, an experimental course of design, fabrication, and testing MEMS resonators is given to undergraduate graduate students the University Tokyo. Through experiences, optimal-for-course resonator design (= with which all have working device) was identified. Several "golden rules" were described for deeper students' understanding. Further extension presented in paper: Integration VLSI read-out circuit. A capacitance readout ASIC that can monolithically be integrated fabricated 0.6 μm...
Abstract Custom-synthesized zeolite is coated and fixed into microcantilevers with microtrenches of 1 to 5 µm width. Zeolite a porous material that absorbs chemical substances; thus, it expected work as sensitive chemical-sensing head. The total mass increases gas absorption, the cantilever resonance frequency decreases accordingly. In this paper, thick sensor array system for high sensitivity selectivity proposed. composed an silicon deep trenches. cantilevers are integrated CMOS-made...
Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift thermal device covered with zeolites when target species adsorbed.