A5088609274- Magnetic properties of thin films
- Surface and Thin Film Phenomena
- Magnetic Field Sensors Techniques
- Microfluidic and Bio-sensing Technologies
- Characterization and Applications of Magnetic Nanoparticles
- Advancements in Semiconductor Devices and Circuit Design
- Advanced biosensing and bioanalysis techniques
- Lipid Membrane Structure and Behavior
- Biosensors and Analytical Detection
- Sensor Technology and Measurement Systems
- Quantum and electron transport phenomena
- Semiconductor materials and devices
- Magnetic Properties and Applications
- Spectroscopy and Quantum Chemical Studies
- Non-Destructive Testing Techniques
- Magneto-Optical Properties and Applications
- Graphene research and applications
- Electromagnetic Simulation and Numerical Methods
- Protein Structure and Dynamics
- Near-Field Optical Microscopy
- Metabolomics and Mass Spectrometry Studies
- Chemical and Physical Properties of Materials
- Terahertz technology and applications
- Advancements in Photolithography Techniques
- Gene expression and cancer classification
Hot Disk (Sweden)
2021
IMEC
2021
Aarhus University
2021
Technical University of Denmark
2009-2018
Ørsted (Denmark)
2016
Princeton University
1994-1995
University of Alberta
1994
Atomic layer deposition of ruthenium is studied as a barrierless metallization solution for future sub-10 nm interconnect technology nodes. We demonstrate the void-free filling in wide single damascene lines using an ALD process combination with 2.5 Å TiN interface and postdeposition annealing. At such small dimensions, effective resistance depends less on scaling than that Cu/barrier systems. Ruthenium potentially crosses Cu curve at 14 10 according to semiempirical model advanced These...
We demonstrate a nanoparticle-based assay for the detection of bacteria causing urinary tract infections in patient samples with total time 4 h. This is significantly shorter than current gold standard, plate culture, which can take several days depending on pathogen. The based padlock probe recognition followed by two cycles rolling circle amplification (RCA) to form DNA coils corresponding target bacterial DNA. readout RCA products optomagnetic measurements specific agglutination DNA-bound...
We demonstrate detection of DNA coils formed from a Vibrio cholerae target at picomolar concentrations using novel optomagnetic approach exploiting the dynamic behavior and optical anisotropy magnetic nanobead (MNB) assemblies. establish that complex second harmonic transmission spectra MNB suspensions measured upon application weak uniaxial AC field correlate well with rotation dynamics individual MNBs. Adding analyte to solution leads formation permanent clusters, namely, suppression...
For the first time DNA coils formed by rolling circle amplification are quantified on‐chip Brownian relaxation measurements on magnetic nanobeads using a magnetoresistive sensor. No external fields required besides field arising from current through sensor, which makes setup very compact. Limits of detection down to 500 Bacillus globigii spores and 2 pM Vibrio cholerae demonstrated, same order magnitude or lower than those achieved previously commercial macro‐scale AC susceptometer. The...
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, non-destructive characterization technique for mapping electrical properties graphene. Here we show several case studies on range different substrates that highlight versatility THz-TDS measurements its relevance process optimization production scenarios.
Epitaxial graphene is a promising route to wafer-scale production of electronic devices. Chemical vapor deposition on silicon carbide offers epitaxial growth with layer control but subject significant spatial and wafer-to-wafer variability. We use terahertz time-domain spectroscopy micro four-point probes analyze the variations quasi-freestanding bilayer grown 4 in. (SiC) wafers find in electrical properties across large regions, which are even reproduced different SiC cut from same ingot....
Electrical four-terminal sensing at (sub-)micrometer scales enables the characterization of key electromagnetic properties within semiconductor industry, including materials’ resistivity, Hall mobility/carrier density, and magnetoresistance. However, as devices’ critical dimensions continue to shrink, significant over/underestimation due a by-product Joule heating probed volume becomes increasingly common. Here, we demonstrate how self-heating effects can be quantified compensated for via 3ω...
Views Icon Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Twitter Facebook Reddit LinkedIn Tools Reprints and Permissions Cite Search Site Citation Frederik W. O/sterberg, Bjarke T. Dalslet, Detlef Snakenborg, Christer Johansson, Mikkel F. Hansen; Chip‐Based Measurements of Brownian Relaxation Magnetic Beads Using a Planar Hall Effect Field Sensor. AIP Conf. Proc. 2 December 2010; 1311 (1): 176–183. https://doi.org/10.1063/1.3530009 Download citation file:...
<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> The accumulation of magnetic beads by gravitational sedimentation and capture on a planar Hall-effect sensor integrated in microfluidic channel is studied systematically as function the bead concentration, fluid flow rate, bias current. It demonstrated that flux proportional to concentration has power law relation rate. mechanisms for are investigated it found dominates accumulation, whereas...
Novel designs of planar Hall effect bridge sensors optimized for magnetic bead detection are presented and characterized. By constructing the sensor geometries appropriately, can be tailored to sensitive an external field, field due beads being magnetized by self-field or a combination thereof. The made nominally insensitive small fields, while maximally beads, self-field. Thus, towards specific applications with minimal influence variables. Three different analyzed theoretically. To...
We demonstrate the use of planar Hall effect magnetoresistive sensors for AC susceptibility measurements magnetic beads with frequencies ranging from DC to 1 MHz. This wide frequency range allows measuring Brownian relaxation diameters 10 nm 250 nm. is measured six different bead types and their hydrodynamic are determined. The found be within 40% nominal diameters. discuss applicability volume-based biosensing respect sedimentation, trapping, signal per bead. Among investigated beads, we...
We present a breakthrough in micro-four-point probe (M4PP) metrology to substantially improve precision of transmission line (transfer length) type measurements by application advanced electrode position correction. In particular, we demonstrate this methodology for the M4PP current-in-plane tunneling (CIPT) technique. The CIPT method has been crucial tool development magnetic tunnel junction (MTJ) stacks suitable random-access memories more than decade. On two MTJ stacks, measurement...
We have studied the behavior of micro four-point probe (M4PP) measurements on two-dimensional (2D) sheets composed grains varying size and grain boundary resistivity by Monte Carlo based finite element (FE) modelling. The 2D sheet FE model was constructed using Voronoi tessellation to emulate a polycrystalline sheet, square sample cut from tessellated surface. Four-point resistances Hall effect signals were calculated for placed in center as function density n ρGB. find that dual...
Sheet resistance, carrier mobility, and sheet density are important parameters in semiconductor production, it is therefore to be able rapidly accurately measure these even on small samples or pads. The interpretation of four-point probe measurements pads non-trivial. In this paper we discuss how conformal mapping can used evaluate theoretically expected measurement values Theoretical calculated from analytical mappings simple geometries compared the found numerical a square onto infinite...
Thin-film sheet resistance measurements at high spatial resolution and on small pads are important can be realized with micrometer-scale four-point probes. As a result of the scale affected by electrode position errors. We have characterized errors in Ru thin film using an Au-coated 12-point probe. show that standard deviation static error is order 5 nm, which significantly affects results single configuration measurements. Position-error-corrected dual-configuration measurements, however,...
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