A5089526446- Advancements in Photolithography Techniques
- Block Copolymer Self-Assembly
- Nanofabrication and Lithography Techniques
- Systemic Lupus Erythematosus Research
- Autoimmune Bullous Skin Diseases
- Gold and Silver Nanoparticles Synthesis and Applications
- Pharmacological Effects of Natural Compounds
- Metabolism and Genetic Disorders
- Semiconductor materials and devices
- Ferroelectric and Negative Capacitance Devices
- Pancreatitis Pathology and Treatment
- Dupuytren's Contracture and Treatments
- Dermatological and Skeletal Disorders
- Autoimmune and Inflammatory Disorders
- Genetic factors in colorectal cancer
- Neuroendocrine Tumor Research Advances
- Syphilis Diagnosis and Treatment
- Biliary and Gastrointestinal Fistulas
- Myasthenia Gravis and Thymoma
- Biomedical Research and Pathophysiology
- Glycogen Storage Diseases and Myoclonus
- Blood groups and transfusion
- Erythrocyte Function and Pathophysiology
- Neonatal Health and Biochemistry
- Pharmacology and Obesity Treatment
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
2015-2024
CEA LETI
2015-2024
Université Grenoble Alpes
2015-2024
CEA Grenoble
2015-2024
Institut des Matériaux Jean Rouxel
2016-2019
Nantes Université
2016-2019
Centre National de la Recherche Scientifique
2016-2019
Institut polytechnique de Grenoble
2015-2019
Université de Technologie de Troyes
2013
Hôpital Edouard Herriot
2008
This article explores seventeenth century animal representations to understand how they were perceived at the time. It examines convergence of symbolism between European and indigenous American traditions, further complicated by introduction new species such as pigs, horses, sheep following arrival in Americas. impacted local ecosystem. Through analysis religious artwork chronicles period, this study seeks ornamentation representation influenced transformed fauna both novel devastating ways.
Aim: The goal of occupational therapy (OT) is to facilitate adjustments lifestyle and prevent function loss. This study evaluated the effects an early OT programme in rheumatoid arthritis (RA). Methods: We conducted a randomised, blind, controlled trial enrolling 60 patients with RA, divided into 2 groups. At baseline, group 1 received full information no information. In extension phase, at 3 months were assessed 6 months. main outcomes grip strength hands (as objective assessment) Health...
Directed Self-Assembly (DSA) of Block Copolymers (BCP) is one the most promising solutions for sub-10 nm nodes. However, some challenges need to be addressed a complete adoption DSA in manufacturing such as achieving DSA-friendly design, low defectivity and accurate pattern placement. In this paper, we propose discuss integration flows using graphoepitaxy contact-hole patterning application. process dependence on guiding density has been studied solved thanks new approach called "DSA...
For sub-10 nm technologies, the semiconductor industry is facing limits of conventional lithography to achieve narrow dimensions. Directed self-assembly (DSA) block copolymers one most promising solutions reach patterns with a high density. One challenge for DSA integration removal poly(methyl methacrylate) (PMMA) selectively polystyrene (PS). In this paper, authors propose study PMMA PS by screening different plasma etch chemistries. The mechanisms films have been understood, thanks x-ray...
The semiconductor industry is aware of its high resource consumption and overall impact on the environment working to minimize it. Especially, use perfluorocarbons (PFC) during dry etching deposit steps device manufacturing a major concern because extremely global warming potential (GWP) lifetime most those compounds. Consequently, plasma significantly contributes CO<sub>2</sub> emissions for sub-28nm technologies Scope 1 2 emissions. Currently, CEA-Leti developing 10nm node FDSOI (Fully...
We report here an original single-step process for synthesis and self-organization of gold colloids by simply incorporating salts into a solution prepared with Polystyrene (PS) -Polymethylmethacrylate (PMMA) copolymer, thiolated PS Propylene Glycol Methyl Ether Acetate (PGMEA) as solvent.The spincoating annealing this allows then the formation domains.Depending on polymer concentration as-prepared solution, there can be either one or several nanoparticles (NPs) per domains.For high in...
Overcoming the optical limitations of 193-nm immersion lithography can be achieved using directed self-assembly (DSA) block-copolymers (BCPs) as a low-cost and versatile complementary technique. The goal this paper is to investigate potential DSA address line space (L/S) high-resolution patterning by performing density multiplication lines with graphoepitaxy approach. As surface affinity key parameter in self-assembly, three variations, or “flavors,” template are investigated regarding...
A critical challenge for directed self-assembly of block copolymers is the selectivity between two polymer phases. Polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) one most studied block-copolymers to reach sub-20 nm patterns. very high PMMA/PS (&gt;10:1) required conserve a sufficient PS pattern thickness allowing transfer sublayers. In this paper, authors propose develop chemistry full PMMA removal without consumption. It based on CO and CO-H2 cycles get etch control. The...
Directed self-assembly of block copolymers is one the most promising solutions to reach sub-20 nm patterns. A critical challenge this technique PMMA removal selectively polystyrene (PS). very high PMMA:PS selectivity (&gt;10:1) required conserve a sufficient PS pattern thickness allowing transfer sublayers. In paper, authors propose CH4-N2 chemistry full without consumption. This based on controlling polymerization rate by tuning ratio between methane and di-nitrogen. Finally, benefits...
For sub-10nm technologies, the semiconductor industry is facing limits of conventional lithography to achieve narrow dimensions. DSA (Directed Self-Assembly) Block Copolymers (BCP) one most promising solutions reach patterns with a high density. One challenge for integration removal PMMA selectively PS. In this paper, we propose study PS by screening different plasma etch chemistries. These chemistries developed on blanket wafers have been tested cylindrical and lamellar patterned wafers.
We discuss here different strategies for making arrays of Au nanoparticles using copolymer templates. Top-down and bottom-up routes are considered the optical properties as-prepared discussed compared to numerical simulations. Potential applications such as biosensors or strain sensors is also assessed.
Hierarchical structures that combine microlens arrays and nanostructures exhibit exceptional potential in enhancing optical characteristics of optoelectronic devices. Furthermore, multi-scale architectures confer multifunctional capabilities to these Existing methodologies for creating hierarchical can be classified by the initial structure fabricated: "microfirst" "nanofirst" approaches. Among these, nanofirst strategy stands out as most versatile, despite presenting challenges 3D...