A5100453424- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Ultrasonics and Acoustic Wave Propagation
- Microfluidic and Capillary Electrophoresis Applications
- Heat Transfer and Boiling Studies
- Heat Transfer and Optimization
- Analytical Chemistry and Sensors
- Ultrasound Imaging and Elastography
- Nanowire Synthesis and Applications
- Gas Sensing Nanomaterials and Sensors
- Microfluidic and Bio-sensing Technologies
- Photonic and Optical Devices
- Heat Transfer Mechanisms
- Photorefractive and Nonlinear Optics
- Thermoelastic and Magnetoelastic Phenomena
- Electrical and Bioimpedance Tomography
- Advanced Sensor and Energy Harvesting Materials
- Ferroelectric and Piezoelectric Materials
- Innovative Microfluidic and Catalytic Techniques Innovation
- Advancements in Semiconductor Devices and Circuit Design
- Numerical Methods and Algorithms
- Nanofabrication and Lithography Techniques
- Thermal properties of materials
- Fluid Dynamics and Thin Films
University of Electronic Science and Technology of China
2011-2025
Sichuan Research Center of New Materials
2025
Chengdu Women's and Children's Central Hospital
2020-2023
Zhuzhou Central Hospital
2020
Shanghai Industrial Technology Institute
2020
National Engineering Research Center of Electromagnetic Radiation Control Materials
2019
Peking University
2006-2018
National University of Singapore
2013-2015
Institute of Microelectronics
2015
Agency for Science, Technology and Research
2015
A piezoelectric micromachined ultrasonic transducer (pMUT) has enabled numerous exciting applications. However, residual stress and initial buckling may worsen the transmitting sensitivity of a pMUT, also limit its application commercialization. In this paper, we report new innovative pMUT with perfectly flat membrane, i.e., zero-bending membrane. Leveraging on stress-free AlN thin film, framelike top electrode layout, integrated vacuum cavity, deflection suspended membrane is significantly...
The linearity of a gate-all-around junctionless silicon nanowire (SiNW) FET has been analyzed. SiNW shows perfectly linear <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$I_{D}$</tex></formula> – Notation="TeX">$V_{G}$</tex></formula> relation and nearly zero output conductance. mechanism its behaviors due to degenerate doping level also demonstrated. For RF applications, the proposed exhibits much...
An ultrasonic transducer with a wide frequency bandwidth is always preferred for diagnostic ultrasound imaging, because can reduce the duration of an pulse and enhance axial imaging resolution. However, both conventional normal piezoelectric micromachined (pMUT) quite limited. To overcome this limitation, mode-merging pMUT presented in letter. By using rectangular membrane large length/width aspect ratio, several resonant modes are excited within narrow range. When works largely damped...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a promising candidate for the next-generation 3-D diagnostic imaging. However, transmitting sensitivity of reported pMUT not satisfied so far. Enhancement hence always desirable. In this letter, we report piston-like pMUT. With help etching holes in membrane, mode shape becomes from Gaussian-like to piston-like, which enables higher transmitted acoustic pressure. addition, frequency such does decrease after are fabricated, but...
Compared with polymer-based biochips, such as polydimethylsiloxane (PDMS), glass based chips have drawn much attention due to their high transparency, chemical stability, and good biocompatibility. This paper investigated the molding process (GMP) for fabricating microstructures of microfluidic chips. The material was D-ZK3. Firstly, a mold protrusion microstructure prepared used fabricate grooves evaluate GMP performance in terms roughness height. Next, molds three typical chips, example,...
Aluminum Nitride (AlN) based surface acoustic wave (SAW) pressure sensors for harsh environment applications are of great interest in recent years. Such sensor employs a thick diaphragm (∼50 μm) to endure the high pressure, but this seriously limits sensitivity these devices. Understanding working mechanism and effect geometrical parameters will yield design principles achieve improved sensitivity. In letter, on performance SAW is studied. AlN resonators (100) wafer with different shapes...
ABSTRACT Melamine‐based benzoxazine resins overcome the disadvantages of conventional polybenzoxazine, such as high brittleness and difficult processing. However, reactivity is too to be easily processed. In this work, phenolphthalein‐type melamine‐based (PTma‐BG) was synthesized from paraformaldehyde, phenolphthalein, melamine, benzeneguanoamine. The chemical structure PTma‐BGs characterized by fourier transform infrared spectroscopy (FTIR) proton nuclear magnetic resonance ( 1 H NMR),...
We present a nanoelectromechanical system piezoresistive pressure sensor with annular grooves on the circular diaphragm where silicon nanowires (SiNWs) are embedded as sensing elements around edge. In comparison our previous flat sensor, this new structure enhances device sensitivity by 2.5 times under range of 0-120 mmHg. By leveraging SiNWs piezoresistors, improvement is even remarkable in contrast to other recently reported devices. addition, miniaturized (radius 100 μm) can be...
Viscosity and density are two important physical parameters of liquid. Such widely used for label-free chemical detection. Conventional technologies employ acoustic wave sensors to detect viscosity density. In these sensors, the liquid under test directly contacts with surface sensor. The produced in sensor leaks adjacent layer, causing a shift resonance frequency However, such not able separately measure because jointly affect frequency. Although some indirect methods decoupling have been...
Thermoelastic dissipation is one of the main dissipative mechanisms in piezoelectric micromachined ultrasonic transducers (pMUTs). In this paper, we firstly propose pMUTs with etching holes to decrease thermoelastic and enhance quality factor (Q). The effectively disturb heat flow, thus reduce loss. Working mechanism based on Zener's model interpreted. experiment results show that Q pMUT three rows increased by 139% from 2050 4909 compared traditional one. Temperature coefficient frequency...
Abstract Background: A newly infectious diseases named coronavirus disease 2019 (COVID-19) emerged in China and now has spread many countries, constituted a public health emergency of international concern. Extracorporeal membrane oxygenation (ECMO) is used as salvage therapies critical COVID-19 patients with respiratory/cardiac failure. Case presentation: 49-year-old female patient was diagnosed progressed to cases, she successfully treated the application awake extracorporeal oxygenation....
This work presents the sensitivity enhancement of AlN based surface acoustic wave (SAW) pressure sensor fabricated on Si (100) wafer. Based theoretical analysis, a novel concept is proposed to improve with crystalline direction. The effect propagation along < 100> and 110> direction SAW has been studied by finite element method. simulation results indicate that oriented in shown possess high compared increase due larger <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML"...
In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains integrated vacuum cavity, which is micro-fabricated using cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute without help of external package, and gives very accurate reference pressure. Meanwhile, presented superior to previously reported sensors in terms temperature drift. With carefully designed dual compensation...
Implementation of checklists has been shown to be effective in improving patient safety. This study aims evaluate the effectiveness implementation a checklist for daily care processes into clinical practice pediatric intensive units (PICUs) with limited resources.
Abstract An apparatus for studying multiple samples simultaneously using magnetic resonance imaging was proposed. It consists of a number individually resonant radiofrequency microcoils, each which are inductively coupled to larger transmit and receive coil. The advantages this approach ease construction coil replacement, if necessary, the requirement only one channel. Theoretical analysis based on equivalent circuit models has been performed, showing that when n microcoils critically coil,...
This work illustrates the temperature stability of an AlN-based surface acoustic wave (SAW) pressure sensor working at different pressures. At atmospheric pressure, coefficient frequency (TCF) in range 18 °C to 460 is tested be −35.68 ppm/°C. With increasing from 0 MPa 2 MPa, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\vert $ </tex-math></inline-formula> TCF found as decreased by 0.43 A finite element...
A micro-channel heat sink is a promising cooling method for high power integrated circuits (IC). However, the understanding of such device not sufficient, because tools studying it are very limited. The details inside micro-channels readily available. In this letter, comprehensively studied using temperature sensors. highly sensitive thin film sensors can accurately monitor change in real time. outstanding dissipation performance proven terms maximum temperature, speed and resistance....