Glass is a common material used in various microsystems including sensors, actuators, and microfluidic devices due to its extraordinary properties. However, lack of flexibility elasticity limits potential for further applications. To solve this issue, thinning the thick glass plate few microns solution. conventional methods plates are complex, risky, time-consuming, difficult implementation at laboratory level. This paper reports an efficient convenient fabrication method independent...

We demonstrated a self-driven chemical micropump powered by self-oscillating motions of synthetic polymer gel converting energy into displacements thin polydimethylsiloxane (PDMS) sheet to produce directional flow via micro check valves. The oscillations induced the oscillatory Belousov-Zhabotinsky (BZ) reaction generate large volume change. To effectively exploit this change, bars were used as drivers. They sandwiched fixed cover glass and push-bar communicate expanding (pushing) force...

Abstract Several clinical studies have been conducted into the practicality and safety of regenerative therapy using hESC/iPSC-retinal pigment epithelium (RPE) as a treatment for diseases including age-related macular degeneration. These used either suspensions RPE cells or an cell sheet. The can be injected minimally invasive procedure but delivery intended number at exact target location is difficult; sheets take longer time to prepare, surgical placed area. In research reported here, we...

This paper describes the design, simulation and fabrication of a micro conveyer system (MCS) with straight displacement containers based on ratchet mechanisms electrostatic comb-drive actuators. MCS consists linear comb actuators, racks. The can be moved different velocities by actuators through teeth. In this study, SOI wafer device layer 30 µm buried SiO2 4 is used. Each module has dimensions 6 × mm2, fabricated using only one mask, ICP-RIE vapor HF etching techniques, assembled to create...

In this paper, we propose a fabrication and characterization of silicon mold for PMMA hot embossing process. Silicon molds were fabricated from wafer with thickness 500μm. First, DRIE technique was performed after optimized etching time deposition (passivation) to obtain depth 30μm positive tapered sidewall 1°. This is very important de-molding process while embossing. Second, in order reduce scalloping steps on the DRIE, soaked TMAH solution 20% at 80°C 10 minutes without magnetic stirrer....

Loading individual oocytes is a critical step for injecting RNA, expressing heterologous proteins, performing electrophysiological measurements, and so on. However, existing methods remain challenge automatically loading multiple single into different locations. Herein, novel microfluidic chip on robotic manipulator (chip‐on‐robot) with feedback control flexible manipulation of within large spatial range proposed. The controls the to reach locations based imaging feedback. then utilizes...

Abstract Polymethyl methacrylate (PMMA) has been proposed as a material for micro-electromechanical systems (MEMS) to initiate the research on environmentally friendly micro-nano machining technology using polymer materials. A MEMS process developed hot embossing and precision machining. structures less than 2 μm were successfully embossed. The PMMA layer that remained after was removed by polishing release movable parts. electrostatic comb-drive microactuator fabricated. Both finger width...

This paper presents a novel fabrication process for monolithic PMMA (polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface-activated direct bonding and elliptical vibration cutting. The robustness capability of the method are demonstrated through sophisticated freestanding microstructures, such as rotation mirror device integrated with comb actuators. consists silicon mold by deep-RIE, microstructure formation PMMA–PMMA surface activation, releasing or...

We present an efficient fabrication technique for a glass microdome structure (GMDS) based on the microthermal expansion principle, by inflating microcavities confined between two thin slides. This allows controlling height, diameter, and shape of GMDS with uniformity under 5%. The has high potential application microlens lens array. inflated hollow, is stable at extreme environments such as in strong acid temperature conditions. More importantly, hollow can be filled liquid substances to...

In this study, we aim to develop a technology drive electrically conductive nanofibers made of polymers as an actuator. conventional actuator, because the potential is applied two-dimensional planar film shape, large electric power necessary, displacement small, and application difficult.

Abstract Micro total analysis system (μTAS) is expected to be applied in various fields. In particular, since electrochemical measurement inexpensive and easy, can integrated with a microchannel. However, detection sensitivity microchannel lowered because the diffusion of target limited. an ordinary system, using stirrer beaker overcome limited diffusion. We previously proposed new that combines microliquid solution agitation technology surface acoustic waves (SAWs) μTAS. The SAWs function...

The chemotaxis of Dictysotelium discoideum cells in response to a chemical gradient cyclic adenosine 3',5'-monophosphate (cAMP) was studied using newly designed microfluidic device. device consists 800 cell-sized channels parallel, each 4 μm wide, 5 high, and 100 long, allowing us prepare the same all observe motility 500-1000 individual simultaneously. percentage that exhibited directed migration determined for various cAMP concentrations ranging from 0.1 pM 10 μM. results show highest at...

Mixing is difficult in microfluidic devices due to the low Reynolds' number. We proposed and demonstrated a surface-acoustic-wave (SAW)-based system which can control temperature by mounting heater. This device has hollow cylindrical reservoir made of resin on piezoelectric substrate (LiNbO3), solution be rotated injecting SAWs from both sides, are shifted parallel central axis reservoir. 0.75 W power was supplied IDT generate SAWs, rise liquid measured with thermographic camera when 0 0.55...

This paper reports on the detection and manipulation of cells using a pipette tip with capacitive microsensor fabricated by combined 3D printing MEMS processes. was directly onto device. First, pair comb electrode sensor traditional process. Then, structure 3D-printed substrate projection micro stereolithography. process is possible to form nm- cm-scale structures integrally high precision three-dimensionally. The device successfully detected cell suction ejection. In addition, transfer...

This paper presents an efficient and environment friendly fabrication technology of MEMS devices using biodegradable polymer material applying hot embossing polishing process. The robustness capability the method are demonstrated through sophisticated polylactic acid (PLA) movable microstructures. In this research, a monolithic PLA thermal microactuator has been developed as low environmental load device. All fabricated tested successfully. displacement was about 11 times larger than that Si...

In this paper, the design of a W-band dielectric lens antenna to be used for 2D imaging is presented. The capability focus EM field in horizontal plane analyzed. Near-field simulations and measurements are conducted purpose. Finally, Scatterer Mapping Technique based on Mono-Frequency Mono-Focusing operator evaluate effect lenses when some straightforward scenarios. A notable improvement observed scatter mapping results antennas used.

We propose the design, simulation and preliminary fabrication of Micro Conveyer Systems (MCS) based on polymer electrostatic comb-drive actuators using polymethylmethacrylate (PMMA). This MCS consists linear comb actuators, rotational micro containers, a ratchet mechanism. used for carrying nano samples such as protein, cells, are moved by comb-actuators through The silicon was fabricated checked to confirm characteristics working principles. Each PMMA MCS, which has dimension 1x1cm2, will...