A5008572903- Advanced X-ray Imaging Techniques
- Optical Coatings and Gratings
- X-ray Spectroscopy and Fluorescence Analysis
- Advanced Surface Polishing Techniques
- Optical measurement and interference techniques
- Crystallography and Radiation Phenomena
- Ion-surface interactions and analysis
- Semiconductor materials and interfaces
- Advancements in Photolithography Techniques
- Surface Roughness and Optical Measurements
- Electron and X-Ray Spectroscopy Techniques
- Advanced Measurement and Metrology Techniques
- High-pressure geophysics and materials
- Intermetallics and Advanced Alloy Properties
- Laser Material Processing Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Silicon and Solar Cell Technologies
- Diamond and Carbon-based Materials Research
- Photorefractive and Nonlinear Optics
- Force Microscopy Techniques and Applications
- Magneto-Optical Properties and Applications
- Laser-Plasma Interactions and Diagnostics
- Photonic and Optical Devices
- Aluminum Alloys Composites Properties
- Medical Imaging Techniques and Applications
Lawrence Berkeley National Laboratory
2014-2023
Moscow State University of Civil Engineering
2017
Argonne National Laboratory
2017
Bellingham Technical College
2017
National Synchrotron Radiation Research Center
2017
Lintec Corporation (Japan)
2017
Tongji University
2017
Japan Synchrotron Radiation Research Institute
2017
Osaka University
2017
Canadian Light Source (Canada)
2017
Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires use of very high line density gratings with optimal design resulting a Blazed Multilayer Grating (BMG) structure. Here we demonstrate production near-atomically perfect Si blazed substrates an ultra-high groove (10,000 l/mm) together measured theoretical performance Al/Zr multilayer coating on grating. A 1st order absolute efficiency 13% 24.6% was achieved at incidence angles 11° 36° respectively. Cross-sectional...
Many technologies based on cells containing alkali-metal atomic vapor benefit from the use of antirelaxation surface coatings in order to preserve spin polarization. In particular, paraffin has been used for this purpose several decades and demonstrated allow an atom experience up 10 000 collisions with walls its container without depolarizing, but details operation remain poorly understood. We apply modern bulk techniques study characterize properties that enable effective preservation...
Imperfections in the multilayer stack deposited on a saw-tooth substrate are main factor limiting diffraction efficiency of extreme ultraviolet and soft x-ray multilayer-coated blazed gratings (MBGs). Since perturbations occur vicinity antiblazed facets substrates, reduction groove density MBGs is expected to enlarge area unperturbed result higher efficiency. At same time grating should be optimized for higher-order operation order keep high dispersion spectral resolution. In this work we...
The optical design of a two-dimensional imaging soft X-ray spectrometer is described. A monochromator will produce dispersed spectrum in narrow vertical illuminated stripe (∼2 µm wide by ∼2 mm tall) on sample. use inelastically scattered X-rays to image the extended field sample incident photon energy direction (vertical), resolving energy. At same time it and disperse photons orthogonal (horizontal) direction, principal challenge system that images from flat-field illumination flat detector...
Volume x-ray gratings consisting of a multilayer coating deposited on blazed substrate can diffract with very high efficiency, even in orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically the ability to create structure near atomic perfection. In this Letter we report method produce these structures. We measurements that show, for 5000l/mm grating diffracting third order,...
Deposition of multilayers on saw-tooth substrates is a key step in the fabrication multilayer blazed gratings (MBG) for extreme ultraviolet and soft x-rays. Growth can be perturbed by shadowing effects caused highly corrugated surface substrates, which results distortion stack structure degradation performance MBGs. To minimize effects, we used an ion-beam sputtering machine with collimated atomic flux to deposit Mo/Si substrates. The conditions were optimized finding balance between...
The effect of a faceted surface geometry on controlling the direction well-defined line patterns block copolymer (BCP) microdomains over macroscopic areas is reported. Facets with asymmetric base angles can control BCP oriented either parallel or perpendicular to facets depending film thickness.
A grand challenge in soft x-ray spectroscopy is to drive the resolving power of monochromators and spectrometers from 10(4) achieved routinely today well above 10(5). This need driven mainly by requirements a new technique that set have enormous impact condensed matter physics, Resonant Inelastic X-ray Scattering (RIXS). Unlike absorption spectroscopy, RIXS not limited an energy resolution dictated core-hole lifetime excitation process. Using much higher than used for normal enables access...
Diffraction gratings are used from micron to nanometer wavelengths as dispersing elements in optical instruments. At shorter wavelengths, crystals can be diffracting elements, but due the 3D nature of interaction with light wavelength selective rather than dispersing. There is an urgent need extend grating technology into x-ray domain 1 0.1 nm, this requires use that have a faceted surface which facet angles very small, typically less 1°. Small also required extreme ultra-violet and soft...
Diffraction efficiency of multilayer-coated blazed gratings (MBG) strongly depends on the perfection sawtooth-shaped layers in overall composite structure. Growth multilayers sawtooth substrates should be carefully optimized to reduce groove profile distortion and, at same time, avoid significant roughening multilayer interfaces. In this work, we report a way optimize growth sputter-deposited Mo/Si through variation sputtering gas pressure. We believe new record for diffraction 44% was...
A 2500 lines/mm Multilayer Blazed Grating (MBG) optimized for the soft x-ray wavelength range was fabricated and tested. The grating coated with a W/B4C multilayer demonstrated record diffraction efficiency in 2nd blazed order energy from 500 to 1200 eV. Detailed investigation of properties that high groove density MBGs is not limited by normal shadowing effects limits grazing incidence performance. Refraction inherent asymmetrical Bragg were experimentally confirmed MBGs. refraction affects...
Multilayer coated blazed gratings with high groove density are the best candidates for use in resolution EUV and soft x-ray spectroscopy. Theoretical analysis shows that such a grating can be potentially optimized dispersion spectral desired diffraction order without significant loss of efficiency. In to realize this potential, fabrication process should provide perfect triangular profile an extremely smooth surface facets. Here we report on recent progress achieved at Advanced Light Source...
A modulation transfer function (MTF) calibration method based on binary pseudorandom (BPR) gratings and arrays has been proven to be an effective MTF for interferometric microscopes a scatterometer. Here we report further expansion of the application range method. We describe 6 in. phase shifting Fizeau interferometer. Beyond providing direct measurement interferometer's MTF, tests with BPR array surface have revealed asymmetry in instrument's data processing algorithm that fundamentally...
A process for fabrication of ultra-precise diffraction gratings high resolution x-ray spectroscopy was developed. grating pattern with constant or variable line spacing (VLS) is recorded on a quartz plate by use e-beam lithography nanometer scale accuracy the groove placement. The transferred to massive blank large area nanoimprint followed dry or/and wet etching shaping. High fidelity transfer step confirmed differential wavefront measurements. Successful implementation suggested approach...
The damage threshold and mechanism of extreme-ultraviolet Sc/Si multilayer mirror coatings are investigated with focused nanosecond pulses at 46.9-nm radiation from a compact capillary-discharge laser. Damage fluences approximately 0.08 J/cm2 measured for deposited on both borosilicate glass Si substrates. use scanning transmission electron microscopy small-angle x-ray diffraction techniques reveals the thermal nature mechanism. results relevant to newly developed high-flux sources in applications.
State of the art soft x-ray spectroscopy techniques like Resonant Inelastic X-ray Scattering (RIXS) require diffraction gratings which can provide extremely high spectral resolution 10<sup>5</sup>-10<sup>6</sup>. This problem may be addressed with a sliced multilayer grating an ultra-high groove density (up to 50,000 mm<sup>-1</sup>) proposed in recent publication [Voronov, D. L., et al., Proc. SPIE 6705, 67050E (2007)]. It has been suggested fabricate such by deposition on substrate is...
A new facility is described that being constructed for coherent scattering and microscopy at the Advanced Light Source. The undulator beamline delivers maximum flux to two experiment programs. One soft x-ray correlation studies, other diffractive imaging using ptychographic reconstruction techniques. energy resolution sufficient NEXAFS spectroscopy with full polarization control, from below carbon edge 2500eV. New instrumentation planned wavelength limited 2D 3D spatial better than 10nm...
Fabrication of diffraction grating for x-rays is a very challenging problem due to the exacting requirements surface quality, groove position, and profile. Traditional fabrication techniques have significant limitations do not cover all necessary requirements. For example, classical holographic recording limited in type patterns that can be produced. This particularly important design wide aperture high resolution spectrometers, where aberration correction using complex necessary. We are...
We have developed a method for the manufacture of x-ray diffraction gratings with arbitrarily small blaze angles. These are made by process in which high angle grating anisotropic etching Si (111) is subjected to planarization and reactive ion etching. Differential medium silicon ensures reduction angle. Repeated application this leads increasing perfection an This opens way highly efficient low line density gratings, damage resistant ultra-high power applications such as free electron...
We developed a new method of making ultra-low blaze angle diffraction gratings for x-ray applications. The is based on reduction the master grating by nanoimprint replication followed plasma etch. A blazed with relatively large fabricated anisotropic wet etching Si single crystal substrate. surface replicated polymer material top quartz substrate nanoimprinting. Then second nanoimprinting performed using 1st replica as mold to replicate saw-tooth into resist layer reactive ion etch used...