A5104079377- 3D IC and TSV technologies
- Electronic Packaging and Soldering Technologies
- Electrical and Thermal Properties of Materials
- Semiconductor materials and devices
- Advanced Sensor and Energy Harvesting Materials
- GaN-based semiconductor devices and materials
- Inertial Sensor and Navigation
- Advanced MEMS and NEMS Technologies
- Microwave Engineering and Waveguides
- Additive Manufacturing and 3D Printing Technologies
- Heat Transfer and Optimization
- Ferroelectric and Piezoelectric Materials
- Photonic and Optical Devices
- Acoustic Wave Resonator Technologies
- Nanofabrication and Lithography Techniques
- Neuroscience and Neural Engineering
- Heat Transfer and Boiling Studies
- Advanced Surface Polishing Techniques
- Electromagnetic Compatibility and Noise Suppression
- Target Tracking and Data Fusion in Sensor Networks
- Copper Interconnects and Reliability
- Image Enhancement Techniques
- Advancements in Photolithography Techniques
- Silicon Carbide Semiconductor Technologies
- Gait Recognition and Analysis
Peking University
2016-2025
Peking University Shenzhen Hospital
2015-2024
Suzhou University of Science and Technology
2020-2024
University Town of Shenzhen
2021-2024
San’an Optoelectronics (China)
2017-2024
Nankai University
2023
Institute of Microelectronics
2010-2022
National Center for Nanoscience and Technology
2013-2022
GTx (United States)
2019
Fuzhou University
2019
Stretchable and flexible sensors attached onto the surface of human body can perceive external stimuli, thus attracting extensive attention due to their lightweight, low modulus, cost, high flexibility, stretchability. Recently, a myriad efforts have been devoted improving performance functionality wearable sensors. Herein, this review focuses on recent remarkable advancements in development stretchable Multifunction these is realized by incorporating some desired features (e.g.,...
<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> This paper introduces a mobile human airbag system designed for fall protection the elderly. A Micro Inertial Measurement Unit (<formula formulatype="inline"> <tex Notation="TeX">$\mu$</tex></formula>IMU) of 56 mm<formula Notation="TeX">$\,\times\,$</tex></formula>23 Notation="TeX">$\,\times\,$</tex></formula>15 mm in size is built. unit consists three dimensional MEMS accelerometers, gyroscopes,...
Recently, stretchable electronics have been highly desirable in the Internet of Things and electronic skins. Herein, an innovative cost-efficient strategy is demonstrated to fabricate sensitive, stretchable, conductive strain-sensing platforms inspired by geometries a spiders slit organ lobsters shell. The electrically composites are fabricated via embedding 3D percolation networks fragmentized graphene sponges (FGS) poly(styrene-block-butadiene-block-styrene) (SBS) matrix, followed...
In this letter, we demonstrate a recessed-anode Schottky barrier diode (SBD) on double AlGaN/GaN heterojunction structure. A self-terminated, oxidation/wet etching with low-pressure chemical vapor deposition (LPCVD) Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> mask is applied in the anode recess process. Unlike common plasma-based, dry techniques, etched surface not subjected to...
We demonstrate a smart sensor for label-free multicomponent chemical analysis using single ring resonator to acquire the entire resonant spectrum of mixture and neural network model predict composition analysis. The shows high prediction accuracy with low root-mean-squared error ranging only from 0.13 2.28 mg/mL. predicted concentrations each component in testing dataset almost all fall within 95% bands. With its simple detection strategy accuracy, promises great potential applications many fields.
Wearable and implantable devices have gained significant popularity, playing a crucial role in smart healthcare human–machine interfaces, which necessitates the development of more complex electronic circuits on biocompatible flexible materials. Polylactic acid (PLA) stands out due to its biodegradability, cost-effectiveness, low immunogenicity. In this study, we utilize solution-based spin-coating method produce high-quality PLA thin films, serving as substrates for fabrication thin-film...
This paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) piezoelectric micromachined transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency characteristics PMUTs are simulated analyzed. Two pieces with frequency 97 kHz 96 applied. One is used to transmit other receive waves. Time Digital Converter circuit (TDC), correlating clock sound velocity, utilized for...
Emerging biocompatible artificial synapses show promise for bioelectronics but face challenges in high voltage requirements and functionality due to limited research on bioderived materials. This study introduces a pioneering optoelectronic synapse utilizing poly(lactic) acid (PLA) retinoic (RA), addressing the scarcity of materials synapses. The device showcases flexibility curvature sensing bioimprinting, operating at low voltages (10 mV), consuming minimal power (60 fJ), thereby emulating...
This paper presents a new method of human motion recognition based on MEMS inertial sensors data. A Micro Inertial Measurement Unit (μIMU) that is 56mm*23mm*15mm in size was built. unit consists three dimensional accelerometers, gyroscopes, Bluetooth module and MCU (Micro Controller Unit), which can record transfer data to computer through serial port wirelessly. Five categories were done including walking, running, going upstairs, fall standing. Fourier analysis used extract the feature...
Nowadays, location-based services (LBS) has become widely used in our daily life. The most famous system is global positioning (GPS), which limited to outdoor applications and provide poor locating accuracy. In this paper, we present a systems based on inertial MEMS sensor includes three-axis accelerometer, gyroscope magnetometer. can help people get accurate for indoor environments, also available outdoors, because of its self-contained character. It foot wearable device with wireless...
This paper presents the development and analysis of inertial MEMS sensor based system that can detect falls in real time. The is a major part mobile human airbag which prevents elderly from fall induced fractures. detection hardware was designed, could monitor motions feet waist Micro Inertial Measurement Units (μ IMUs) applied this with Zigbee network algorithm what constituted three sub algorithms also developed. designed on data analysis, order to select optimal parts for monitoring...
This paper proposes a position and attitude observer based on INS GPS. Design test results of an adaptive dual-rate Extended Kalman Filter(EKF) estimator for fusing data from Global Positioning Systems (GPS) Inertial Navigation System (INS) in order to estimate the position, velocity, attitude. The EKF consists high-speed filter low-speed filter, fuses Real-Time Kinematic (RTK) GPS INS, pseudorange INS. solution designed isolate noise realize complementary real-time performance high...
In this paper, a TSV interposer embedded with microchannel is proposed for 2.5D integration of GaN RF power device. S-shaped symmetrical radial diversion structure in inlet/outlet region designed to make balance among process, cooling property and flow resistance. order avoid issues regarding fabrication interconnections on thick bonded Si wafer microchannels, as having three different diameters along its axis which are 100mm, 180mm 220mm sequence from the bottom end top total height 500mm....
In this paper, the authors report on a novel tungsten microneedle array fabricated using deep reactive ion etching. The sample was 10 mm long, wide, and 40 μm in pitch. Each had top-end diameter of 7.7 μm, bottom-end 30 length 60 sidewall tilt angle approximately 14°. mechanical strength, hydrophobicity contact impedance were characterized. For rubbing test conducted, which involved moving structure 800-grit abrasive paper with an equivalent slide friction force 2 × 10−3 μN. Results...
The great advances in silicon photonic-sensing technology have made it an attractive platform for wide sensing applications. However, most platforms suffer from high susceptibility to the temperature fluctuation of operating environment. Additional complex and costly chemical signal-enhancement strategies are usually required improve signal-to-noise ratio (SNR). Here, a biotoxoid photonic sensor that is resistant has been demonstrated. This novel consists ring resonator coupled Mach–Zehnder...
This paper presented a three-dimensional (3D) reconfigurable antenna operating in the V-band (40-75 GHz) for first time. Based on co-design of mechanics and electromagnetics, dipole polymer-metal-polymer microstructure was fabricated using Micro-Electro-Mechanical Systems (MEMS) techniques, enabling reconfigurability through repeated stretching releasing bonded elastomer substrate. The center frequency (f <inf xmlns:mml="http://www.w3.org/1998/Math/MathML"...
To address the requirements of sonar imaging, such as high receiving sensitivity, a wide bandwidth, and angle, an AlN PMUT with optimized ratio 0.6 for piezoelectric layer diameter to backside cavity is proposed in this paper. A sample designed fabricated SOI substrate-based bulk MEMS process. The characterization test result demonstrates −6 dB bandwidth approximately 500 kHz measured sensitivity per unit area 1.37 V/μPa/mm2, which significantly surpasses performance previously reported...
An approach to maintain vacuum in microelectromechanical systems (MEMS) by integrating the MEMS fabrication process with getter material preparation is presented this paper. The coating for a thick film of on silicon and glass wafers, two commonly used substrates package, was investigated detail. consists powder mixture zirconium, vanadium iron, which features high sorption capacity active gases such as H2, O2, N2, CO H2O vapour. Various kinds patterned non-evaporable (NEG) films thickness...